Compact, Versatile Vacuum Transfer Robot Suitable for High-Vacuum Environments
Vacuum transfer robot
ELEC-RZ
Model:ELEC-RZ
ULVAC
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ELEC-RZ is a high-vacuum-compatible transfer robot that is compact and low-cost based on the excellent functions and performance of the "Model:COVOT".
Features
- Magnetic fluid seals are used for vacuum sealing, and high vacuum up to 10-6Pa can be used.
- The miniaturization of the actuator makes it more compact and easier to install in equipment.
- A variety of arms are available depending on the stroke, turning radius, number of hands, etc.
- It uses a multi-function display teaching pendant with excellent operability.
Specifications
| Model | ELEC-RZ | |
| Working pressure area | atmospheric pressure～10-6Pa | |
| Wafer Size | 200mm/300mm | |
| Number of wafers held | 1 piece/2 piece | |
| Maximum Reach * | 1056mm | |
| Rotation angle | ±210° | |
| Lifting stroke | 50mm | |
| Minimum Swiveling Diameter * | 964mm depends on the mounting arm | |
| Payload capacity (including hands) | 1kg | |
| Operating speed Telescopic | Telescopic | Max 2.5sec / Full-stroke |
| turning | Max 3.0sec / 180° | |
| Lifting | Max 1.5sec / 20mm | |
| Repeatable Position Accuracy | Telescopic | ±0.2mm |
| turning | ±0.3mm | |
| Lifting | ±0.3mm | |
| Teaching Pendant | Accessory | |
| controller | Separate | |
*Depends on mounting arm and hand.
