Highly accurate vacuum measurement independent of gas type
Ceramic Capacitance Manometer CCMT-100D
ULVAC
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The CCMT-D series is a capacitance manometer, which detects static electric capacitance occurring when a barrier membrane made of ceramic (alumina) is deformed by changes in gas pressure.
Features
- Corrosion resistant ceramic sensor
- Exellent long term signal stability
- Whole pressure measurement that does not depend on the gas types is possible
- Shorten the warm-up Time
- Temperature compensation
- Sensor protected against contamination
- Push button zero point adjustment
- Accurate linear output (DC 0 to 10V)
- Wide range voltage power supply (DC14 to 30V)
Applications
- Vacuum melting or vacuum heat treatment
- Thin films deposition system
- Pressure reduction furnaces
- Gas exchange or gas sealing etc.
- PV, FPD manufacturing equipment
Specifications
| Model | CCMT-D | ||
| Range full scale | CCMT-1000D | 133kPa (1×103 Torr, 1.33×103 mbar) F.S. | |
| CCMT-100D | 13.3kPa (1×102 Torr, 1.33×102 mbar) F.S. | ||
| CCMT-10D | 1.33kPa (10 Torr, 13.3 mbar) F.S. | ||
| CCMT-1D | 133Pa (1 Torr, 1.33 mbar) F.S. | ||
| Resolution | 0.003% of full scale | ||
| Accuracy *1 | ±0.2％±temperature coefficient relative to display value (The value indicates accuracy zero point adjustment) | ||
| Temperature coefficient | Zero voltage | 0.015% F.S. / ℃ | |
| Span voltage | 0.01% R / ℃ | ||
| Operating temperature range | 10 to 50℃ (50 to 122 °F) | ||
| Response rate | 30ms or less | ||
| Material of gas contacting sections | Al2O3、Vacon70 *2、SUS316 *3 , glass ceramics solder, Ag Ti Cu hard solder | ||
| Input power | DC14～30V, 1W | ||
| Output | DC 0 to 10V F.S. | ||
| weight | 329g | ||
| Dimensions | 55mm×117mm | ||
| Temperature compensation | Internal temperature compensation circuit | ||
| Electrical connector | D-sub 15-pin male (No.4-40, DNC screw) | ||
*1 : Non-linearity,hysteresis,repeatability at 25℃ (77℉) ambient operating temperature without tenperature effects after 2 hours operation, after zero sdjustment
*2 : 28% Ni, 23% Co, 49% Fe
*3 : 18% Cr, 10% Ni, 3% Mo, 69% Fe
