Model:CCMT-1D｜Ceramic Capacitance Manometer｜Vacuum Gauge｜Products

Highly accurate vacuum measurement independent of gas type

Ceramic Capacitance Manometer

Model:CCMT-1D

ULVAC

The "Model:CCMT-D" is a capacitance manometer, which detects static electric capacitance occurring when a barrier membrane made of ceramic (alumina) is deformed by changes in gas pressure.

Features

Corrosion resistant ceramic sensor
Exellent long term signal stability
Whole pressure measurement that does not depend on the gas types is possible
Shorten the warm-up Time
Temperature compensation
Sensor protected against contamination
Push button zero point adjustment
Accurate linear output (DC 0 to 10V)
Wide range voltage power supply (DC14 to 30V)

Applications

Vacuum melting or vacuum heat treatment
Thin films deposition system
Pressure reduction furnaces
Gas exchange or gas sealing etc.
PV, FPD manufacturing equipment

Specifications

Model		CCMT-D
Range full scale	CCMT-1000D	133kPa (1×10³ Torr, 1.33×10³ mbar) F.S.
	CCMT-100D	13.3kPa (1×10² Torr, 1.33×10² mbar) F.S.
	CCMT-10D	1.33kPa (10 Torr, 13.3 mbar) F.S.
	CCMT-1D	133Pa (1 Torr, 1.33 mbar) F.S.
Resolution		0.003% of full scale
Accuracy *1		±0.2％±temperature coefficient relative to display value (The value indicates accuracy zero point adjustment)
Temperature coefficient	Zero voltage	0.015% F.S. / ℃
	Span voltage	0.01% R / ℃
Operating temperature range		10 to 50℃ (50 to 122 °F)
Response rate		30ms or less
Material of gas contacting sections		Al₂O₃、Vacon70 2、SUS316 3 , glass ceramics solder, Ag Ti Cu hard solder
Input power		DC14～30V, 1W
Output		DC 0 to 10V F.S.
weight		329g
Dimensions		55mm×117mm
Temperature compensation		Internal temperature compensation circuit
Electrical connector		D-sub 15-pin male (No.4-40, DNC screw)

*1 : Non-linearity,hysteresis,repeatability at 25℃ (77℉) ambient operating temperature without tenperature effects after 2 hours operation, after zero sdjustment
*2 : 28% Ni, 23% Co, 49% Fe
*3 : 18% Cr, 10% Ni, 3% Mo, 69% Fe