Pendulum Valve Model: VFR

ULVAC

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ULVAC's "Model:VFR" Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.

Features

Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
The ULVAC “Model:VFR” valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).

Applications

Large display manufacturing systems
OLED manufacturing systems
Other vacuum systems as main valve and gate valve

Specifications

Model		VFR-400	VFR-500
Common port diameter		Φ400mm	Φ500mm
Flange specification (JIS B2290 equivalency)		VF400	VF500
Open/close specification		2 positions
Open/close operation principle		Pneumatic
Open/close time		8sec	12sec
Valve plate seal		Reverse pressure capable
Max valve plate seal differential pressure (at positive pressure)		0.12 MPa
Max valve plate seal differential pressure (at reverse pressure)		0.12 MPa
Max differential pressure when opening/closing (at positive pressure)		0.5 kPa
Max differential pressure when opening/closing (at reverse pressure)		0.5 kPa
Open conductance		50000L/s	90000L/s
Pressure range		1.0×10-5Pa1‐0.12MPa(abs)
Allowable baking temperature （at stopped position）	Valve body	< 120℃ (248F)
	Cylinder	< 80℃ (176F)
Allowable ambient temperature		10 to 80℃ (50 to 176F)
Allowable Gass temperature		10 to 80℃ (50 to 176F)
Compressed air pressure		0.50 to 0.70MPaG (72.5 to 101.5psi, 5.0 to 7.0bar)
Compressed air supply port		Φ8 tube connection
Maintenance cycle		100,000
Mouting angle		Free
Main parts material	Valve body	AC4CH-T6
	Seal plate	AC4CH-T6
Seal material	Vacuum side	FPM
Oil		Z300
Weight		98kg	155kg
Flange to flange dimension		150mm	170mm

Dimension drawing

VFR-400

VFR-500

Features

Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.

The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.

The ULVAC “Model:VFR” valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).

Specifications

Model		VFR-400	VFR-500
Common port diameter		Φ400mm	Φ500mm
Flange specification (JIS B2290 equivalency)		VF400	VF500
Open/close specification		2 positions
Open/close operation principle		Pneumatic
Open/close time		8sec	12sec
Valve plate seal		Reverse pressure capable
Max valve plate seal differential pressure (at positive pressure)		0.12 MPa
Max valve plate seal differential pressure (at reverse pressure)		0.12 MPa
Max differential pressure when opening/closing (at positive pressure)		0.5 kPa
Max differential pressure when opening/closing (at reverse pressure)		0.5 kPa
Open conductance		50000L/s	90000L/s
Pressure range		1.0×10-5Pa1‐0.12MPa(abs)
Allowable baking temperature （at stopped position）	Valve body	< 120℃ (248F)
	Cylinder	< 80℃ (176F)
Allowable ambient temperature		10 to 80℃ (50 to 176F)
Allowable Gass temperature		10 to 80℃ (50 to 176F)
Compressed air pressure		0.50 to 0.70MPaG (72.5 to 101.5psi, 5.0 to 7.0bar)
Compressed air supply port		Φ8 tube connection
Maintenance cycle		100,000
Mouting angle		Free
Main parts material	Valve body	AC4CH-T6
	Seal plate	AC4CH-T6
Seal material	Vacuum side	FPM
Oil		Z300
Weight		98kg	155kg
Flange to flange dimension		150mm	170mm