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Large Capacity DC Power Supply
DC-20-D
ULVAC
DC-10-D and DC-20-D are DC power supplies for sputtering with 10kW and 20kW output. It consists of reliable parts and circuits. It is a highly reliable power supply that is optimal for plasma loads that
reflects the know-how that has been cultivated over many years, including power supply applications, in the design.
reflects the know-how that has been cultivated over many years, including power supply applications, in the design.
Features
- Abundant high-performance option
- Lightweight and space-saving design
- Lineup of output voltage range 800V and 1000V
- Output control that is familiar with plasma
- Air cooling
- Equipped with excellent ARC function and high-speed ARC cutoff circuit
- Up to 12 units can be operated in parallel
- Compliant with RoHS、CE、SEMI-F47
Applications
- Sputtering equipment for FPD
- Semiconductor Sputtering equipment
- Sputtering equipment for electronic components
- Sputtering equipment for industrial coating
Specifications
| Model | DC-10-D | DC-10-DH | DC-20-D | DC-20-DH | |
| Input | Input voltage | AC208V | |||
| Variation range | AC187V~229V | ||||
| Number of phase/ Frequency |
Three phase for 50/60Hz | ||||
| Input connection | Connector | ||||
| Input capacity | 13.5kVA or less | 25kVA or less | |||
| Output | Rated power | 10kW | 20kW | ||
| Rated current | 25A | 18A | 50A | 40A | |
| Rated voltage | 800V | 1000V | 800V | 1000V | |
| ARC control | If ARC is detected, the inverter is stopped and LARC separates the load side | ||||
| Output connection | Connector | ||||
| Control | Output control system | Constant power control/ Constant current control / Constant voltage control control (V control) |
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| Control accuracy *1 | 1 to 10% of rated power: ±5% or less of set value 10-100% of rated power: The higher of ±0.5% or less of the rated output or ±1% of the set value |
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| Guaranteed control range *2 | Constant power control: 10 to 100% of the rated power value(Option：1-100%) | ||||
| Parallel operation *3 | MAX 12 unit | ||||
| Control mode system | LOCAL control / USER control / SERIAL communication control (RS232C or RS485)/EtherCAT *4 | ||||
| Colling | Air cooling | ||||
| Dimensions | 483mm（W）×630mm（D）×133mm（H） | ||||
| Mass | 29kg | 36kg | |||
| Standard | RoHS、CE、SEMI F47 | ||||
Working temperature 5-40℃
Usage environment Indoor use at 1,000m or less above sea level without direct sunlight and corrosive gas.
*1：Option：Guaranteed accuracy in the range 1-10% of the rating.
*2：There is an output voltage lower limit and an output current lower limit.It is also possible to guarantee from 1% by option.
*3：Combination of 800V unit and 1000V unit is not possible.
*4：EtherCAT option.
Usage environment Indoor use at 1,000m or less above sea level without direct sunlight and corrosive gas.
*1：Option：Guaranteed accuracy in the range 1-10% of the rating.
*2：There is an output voltage lower limit and an output current lower limit.It is also possible to guarantee from 1% by option.
*3：Combination of 800V unit and 1000V unit is not possible.
*4：EtherCAT option.
Dimension drawing
