Calibrated Leak
Model:CLC
ULVAC
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Calibration leak that allows helium gas to pass through a microscopic hole (Channel). There are two kinds of calibration methods: vacuum method and sniffer method.
Specification
| Model | Specification | calibration method | Working pressure range | Joint |
| CLC-04A | 10-4Pa･m3/s level | Choose vacuum method or sniffer method | ⊿P = 0.1MPa | Φ18mm pipe(with Rc1/4) |
| CLC-05A | 10-5Pa･m3/s level | |||
| CLC-06A | 10-6Pa･m3/s level |
Dimension drawing
