Calibrated Leak
Model:CLM
ULVAC
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Calibrated leak that utilizes the penetration of helium gas through glass (membrane). (Vacuum calibration)
Specifications
| Model | Specification | Gas Pressure | Joint |
| CLM-07AY | 10-7Pa･m3/s level | 261kPa(abs) | Φ18mm pipe(with ｍanual valve) |
| CLM-08A | 10-8Pa･m3/s level | 251kPa(abs) | |
| CLM-09AZ | 10-9Pa･m3/s level | 261kPa(abs) | |
| CLM-10A | 10-10Pa･m3/s level | 101kPa(abs) |
Internal calibrated leak for “Model:HELIOT”
| Model | Specification | Gas Pressure | Applicable models |
| CLM-08E | 10ｰ8Pa･m3/s level | 251kPa(abs) | “Model:HELIOT710,700,300” |
| CLM-08F | 10-8Pa･m3/s level | 251kPa(abs) | “Model:HELIOT900” |
Dimension drawing
CLM-08A, CLM-09AZ, CLM-10A
CLM-07AY
CLM-08F
CLM-08E
