Option / Consumable parts G-set option for HELIOT MONO
ULVAC
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This is a proposal for customers who do not need a PLC for their equipment and use HELIOT MONO's vacuum vessel method sequence.
・Touch panel (with 5m cable *15m cable option is available)
Controller for HELIOT MONO
・Vacuum gauge set (with 2m cable and piping)
Vacuum gauges set for HELIOT MONO that can read pressure.
・Valve I/O unit
Unit board for controlling valves for the vacuum vessel method. It is built into the main unit.。
・4-piece valve set (each with 3m cable)
4 valves required for the vacuum vessel method test. Connected to and controlled by valve I/O unit.
・Touch panel (with 5m cable *15m cable option is available)
Controller for HELIOT MONO
・Vacuum gauge set (with 2m cable and piping)
Vacuum gauges set for HELIOT MONO that can read pressure.
・Valve I/O unit
Unit board for controlling valves for the vacuum vessel method. It is built into the main unit.。
・4-piece valve set (each with 3m cable)
4 valves required for the vacuum vessel method test. Connected to and controlled by valve I/O unit.