Retrofit Bipolar Unit to Achieve a Better Deposition Process
Pulsed and DC power supply systems
Bipolar unit _MFU
Model:MFU-20K
ULVAC
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The MFU, which is available as an external unit for DC power supplies, is an MF power supply for use in sputtering of dual cathodes. It is effective not only for metal films but also for reactive deposition. Stable sputtering is achieved without the loss of the anode.
Features
- Available in the range of 10kHz~100kHz *1
- Master/slave connection enables parallel operation of up to 6 units
- In combination with our DC power supply, a discharge method compatible with dual cathodes can be easily realized.
- *1: At oscillation frequencies exceeding 60kHz, output power, voltage, and current are limited.
Specifications
| Model | MFU-20K | |
| Control Power Input | Input voltage | Single-phase AC100-240V |
| Input Capacity | 400VA or less | |
| Input Specifications | Operating Voltage | 0~-1000V |
| Operating current | 50A | |
| Rated input power | 20kW | |
| Output Specifications | Frequency | 10k-100kHz（Output limit above 61kHz） |
| Rated output voltage | 1000V（RMS） | |
| Rated output current | 50A（RMS） | |
| Output Format | For Dual Target | |
| Cooling method | Forced air cooling | |
| Dimensions(W×D×H) does not contain protrusions | 480×630×177（mm） | |
| Weight | 29kg | |
| Standard | CE、KC、SEMI F47、RoHS(Europe) | |
