DC Power Supply with High Reliability and Advanced Arc Handling Function
Pulsed and DC power supply systems
DC power supply_DC series
Model:DC
ULVAC
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The "Model:DC" is a direct current power supply (DC power supply) for sputtering. It is composed of reliable components and circuits. It is a highly reliable power supply that is ideal for plasma loads by reflecting the know-how we have cultivated over many years, including the application of power supplies, in the design.
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DCS0052B
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DC-2/DC-4
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DC-30-44H
Features
- Lightweight and space-saving design
- Lineup of 800V and 1000V output voltage ranges (10/20kW products only)
- Output control with a thorough knowledge of plasma
- Forced air cooling system does not require cooling water
- Equipped with excellent ARC function and high-speed ARC cut-off circuit
- Equipped with excellent ARC function and high-speed ARC cutoff circuit
- Up to 12 units (240kW) can be operated in parallel (10/20kW products only)
- Compliant with CE, SEMI F47 and RoHS (excluding DCS and 400V specifications)
Specifications
| Model | DCS0052B | DC-2 | DC-4 | |
| Input Specifications | Input voltage | Single-phase AC100V/200V | 3-phase AC200V/220V | |
| Input Capacity | 1kVA or less | 3.5kVA or less | 6.2kVA or less | |
| Output Specifications | Rated power | 500W | 2kW | 4kW |
| Ratedcurrent | 1.25A | 5A | 10A | |
| Rated voltage | 800V | |||
| Ignition voltage | About 1100V | 1200V | ||
| control | Control accuracy | ±1％ of rated power (In our prescriptive resistance value.) |
±1％ of set point (In our prescriptive resistance value.) |
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| Control Warranty Coverage | Constant power control, 10 to 100％ of rated power value | Constant power control, 1 to 100％ of rated power value |
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| Interface | Analog/Digital | Analog/Digital、Serial communication （RS232C or RS485） |
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| Parallel operation | No | |||
| Cooling method | Forced air cooling | |||
| Dimensions(W×D×H) does not contain protrusions |
240×450×99（mm） | 241×610×133（mm） | ||
| Weight | Approx.9kg | 15kg | ||
| Standard | Nothing | CE、KC、SEMI F47、RoHS（Europe） | ||
| Model | DC-10-AM | DC-10-H-AM | DC-10-4-AM | DC-20-AM | DC-20-H-AM | DC-20-4-AM | DC-30-44H | |
| Input Specifications | Input voltage | 3-phase AC208V | 3-phase AC380-400V |
3-phase AC208V | 3-phase AC380-400V |
3-phase AC440V |
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| Input Capacity | 13.5kVA or less | 25kVA or less | 41.5 kVA or less |
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| Output Specifications | Rated power | 10kW | 20kW | 30kW | ||||
| Ratedcurrent | 25A | 18A | 25A | 50A | 40A | 50A | 55A | |
| Rated voltage | 800V | 1000V | 800V | 800V | 1000V | 800V | 1200V | |
| Ignition voltage | 1500V | |||||||
| control | Control accuracy | The higher of ±0.5% or less of the rated output or ±1% of the set value | ||||||
| Control Warranty Coverage | 10-100% of rated power value | |||||||
| Interface | Analog/Digital、Serial communication（RS232C or RS485） | SERIAL control (RS232C or RS485) /EtherCAT |
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| Parallel operation | Yes | |||||||
| Cooling method | Forced air cooling | |||||||
| Dimensions(W×D×H) does not contain protrusions | 483×630×133（mm） | 483×650×177（mm） | ||||||
| Weight | 29kg | 36kg | 45kg | |||||
| Standard | CE、KC、SEMI F47、RoHS（Europe） | RoHS （Europe） |
CE、KC、SEMI F47、RoHS（Europe） | RoHS （Europe） |
CE、SEMI F47、RoHS（Europe） | |||
