High-Performance DC Power Supply Continually Evolving with New Features for Process Optimization
Pulsed and DC power supply systems
DC power supply_Model：Digital DC
Model: Digital DC
ULVAC
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The Digital "Model:DC" is a DC power supply for sputtering. It is composed of reliable components and circuits. It is a highly reliable power supply that is ideal for plasma loads by reflecting the know-how we have cultivated over many years, including the application of power supplies, in the design.
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DC-2-D/DC-4-D
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DC-10-D/DC-20-D
Features
- A wide range of advanced options
- Lightweight and space-saving design
- Lineup includes 800V and HV specifications for output voltage range (10/20kw: 1000V / 2/4kw: 900V)
- Output control with a thorough understanding of plasma
- Forced air cooling system eliminates the need for cooling water
- Equipped with excellent ARC function and high-speed ARC cut-off circuit
- Up to 12 units (240 kW) can be operated in parallel（10/20kW products only）
- Compliant with CE, KC, SEMI F47, RoHS
Specifications
| Model | DC-2-D | DC-4-D | |
| Input Specifications | Input voltage | 3-phase AC200V/220V | |
| Input Capacity | 3.5kVA or less | 6.2kVA or less | |
| Output Specifications | Rated power | 2kW | 4kW |
| Ratedcurrent | 5A | 10A | |
| Rated voltage | 800V/900V* | ||
| Ignition voltage | 1200V | ||
| control | Control accuracy | ±1％ of set point (In our prescriptive resistance value.) | |
| Control Warranty Coverage | Constant power control, 1 to 100％ of rated power value | ||
| Interface | Analog/Digital, Serial communication（RS232C or RS485）, EtherCAT（Option） | ||
| Parallel operation | No | ||
| Cooling method | Forced air cooling | ||
| Dimensions(W×D×H) does not contain protrusions | 241×610×133（mm） | ||
| Weight | 15kg | ||
| Standard | CE, KC, SEMI F47, RoHS（Europe） | ||
*Normally, 800V and 900V specifications are optional.
| Model | DC-10-D | DC-10-DH | DC-20-D | DC-20-DH | |
| Input Specifications | Input voltage | 3-phase AC208V | |||
| Input Capacity | 13.5kVA or less | 25kVA or less | |||
| Output Specifications | Rated power | 10kW | 20kW | ||
| Ratedcurrent | 25A | 18A | 50A | 40A | |
| Rated voltage | 800V | 1000V | 800V | 1000V | |
| Ignition voltage | 1500V | ||||
| control | Control accuracy | The higher of ±0.5% or less of the rated output or ±1% of the set value High accuracy options are also available |
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| Control Warranty Coverage | 10-100% of rated power value High accuracy options are also available |
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| Interface | Analog/Digital, Serial communication（RS232C or RS485）, EtherCAT（Option） | ||||
| Parallel operation | Yes | ||||
| Cooling method | Forced air cooling | ||||
| Dimensions(W×D×H) does not contain protrusions | 483×630×133（mm） | ||||
| Weight | 29kg | 36kg | |||
| Standard | CE, KC, SEMI F47, RoHS（Europe） | ||||
