DC Pulse Power Supply Enabling Stable Reactive Sputtering
Pulsed and DC power supply systems
DC PULSE power supply_DC PULSE series
Model:DC PULSE
ULVAC
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The "Model:DC PULSE" is a pulsed power supply that is effective in suppressing abnormal discharges that occur in reactive processes.
This power supply reverses the output voltage at a set period and cancels out charge accumulation (charge-up) on the target surface, thereby suppressing abnormal discharge and improving yield and throughput.
This power supply reverses the output voltage at a set period and cancels out charge accumulation (charge-up) on the target surface, thereby suppressing abnormal discharge and improving yield and throughput.
Features
- High power can be input by suppressing abnormal discharge.
- Reduces substrate damage caused by arcing
- Oscillation frequency can be set from 5kHz to 250kHz for output.
- Up to 6 units can be operated in parallel (only combinations of the same model)
- By changing the operating mode, it can also be used as a DC power supply with a low arc function.
Specifications
| Model | DC-5-P | DC-10-P | |
| Input Specifications | Input voltage | 3-phase AC208V | |
| Input Capacity | 8kVA or less | 13.5kVA or less | |
| Output Specifications | Rated power | 5kW | 10kW |
| Ratedcurrent | 12.5A | 25A | |
| Rated voltage | 5k-150kHz：800V、155k-250kHz：650V | ||
| Frequency | 5k-250kHz | ||
| Reverse voltage pulse width | 0.4μ-5.0μs | ||
| Ignition voltage | 1500V | ||
| control | Control accuracy | The higher of ±0.5% or less of the rated output or ±1% of the set value | |
| Control Warranty Coverage | 10-100% of rated power value | ||
| Interface | Analog/Digital、Serial communication（RS232C or RS485） | ||
| Parallel operation | Up to 6units can be controlled by master/slave communication | ||
| Cooling method | Forced air cooling | ||
| Dimensions(W×D×H) does not contain protrusions |
483×630×133（mm） | ||
| Weight | 29kg | 36kg | |
| Standard | CE、KC、SEMI F47、RoHS（Europe） | ||
