LF Power Supply Supporting Dual Cathodes with Both Reliability and Stability
Pulsed and DC power supply systems
LF power supply_SG
Model:SG-10
ULVAC
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It is designed for plasma generation such as LF power supply, dual cathode sputtering, plasma CVD, etc., and can continuously output rated power at frequencies from 20kHz to 100kHz for plasma loads. Highly reliable and ideal for plasma loads that reflect know-how including power supply applications cultivated over many years in the design
Power supply.
Power supply.
Features
- You can set the oscillation frequency from 20kHz to 100kHz in 1kHz increments. *1
- It is possible to output to the output range of the specifications without changing the transformer tap.
- Pulse output control is possible.
- External analog control, control by controller, etc. are standard equipment, and various controls such as S232C, RS485, and EtherCAT are possible with OPTION.
*1：There is a limit on the output voltage/current depending on the frequency setting conditions.
Specifications
| Model | SG-10-4 | |
| Input Specifications | Input voltage | 3-phase AC380-440V |
| Input Capacitance | 13.2kVA or less | |
| Output Specifications | Maximum power rating | 10kW |
| Rated current | 32A | |
| Rated voltage | 1000Vrms | |
| Oscillation frequency | 20k-100kHz | |
| Control | Control Accuracy | ± 100W (voltage 30V or more, current 1.5A or more) Other conditions apply |
| Control Warranty Coverage | 10-100% of rated power value(Voltage 30V or more, current 1.5A or more) | |
| External control | Analog/Digital, serial communication (RS232C or RS485), EtherCAT (optional) | |
| Cooling method | Water cooling: 7 L/min or more | |
| Dimensions(W×D×H) does not contain protrusions | 483×500×177（mm） | |
| Weight | 40kg | |
| Standard | CE、SEMI F47、RoHS（Europe） | |
