Retrofit Pulse Unit to Achieve a Better Deposition Process
Pulsed and DC power supply systems
PULSE unit _A2K Series
Model:A2K
ULVAC
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The "Model:A2K", which is available as an external unit for DC power supplies, is an abnormal discharge prevention unit that converts a DC output into a pulse output and neutralizes the charge on the target.
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A2KH-25U
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A2K-40K
Features
- High power can be input by reducing abnormal discharge.
- Substrate damage caused by arcing can be reduced.
- Can be connected to existing devices *1
- A2KH-25U: 1kHz ~ 20kHz, A2K-20K/40K: 1kHz ~ 50kHz
- Output pulse synchronization of multiple A2K units is possible *2 *3
- A2K-20K and 40K can operate in parallel up to 6 units each.
Application: Pulse Synchronization System
When the cathodes are close to each other in the same chamber and the cathodes are opposing each other, or when the discharges of multiple A2Ks are interfering, the phase control function can be used to prevent interference of the discharge by setting the reverse pulse of the A2K to the same phase *3 *4
*1: Can be connected to our DC power supply
*2: Pulse synchronization and parallel operation by mixing A2KH-25U, A2K-20K, and 40K are not possible
*3: A2KH-25U requires an external synchronization unit (PHSM/PHSS)
*4: A2K-20K/40K requires an optical sync cable (Pulse link cable)
Specifications
| Model | A2KH-25U | A2K-20K | A2K-40K | |
| Control Power Input | Input voltage | Single-phase AC90-110V | Single-phase AC100-240V | |
| Input Capacity | 100VA or less | 400VA or less | ||
| Input Specifications | Operating Voltage | -100～-800V | ||
| Operating current | 25A | 50A | 100A | |
| Rated input power | 10kW | 20kW | 40kW | |
| Output Specifications | Frequency | 1k-20kHz | 1k-50kHz | |
| Reverse voltage pulse width | 5μs/10μs Switching with internal switch | 3μ-18μs (limited oscillation frequency) | ||
| Oscillation mode | Continuous/1 Pulse/Pass | |||
| Output Format | For Single Target | |||
| Cooling method | Forced air cooling | |||
| Dimensions(W×D×H) does not contain protrusions | 238×450×149（mm） | 480×630×177（mm） | ||
| Weight | 16kg | 30kg | 45kg | |
| Standard | RoHS (Europe) | CE、KC、SEMI F47、RoHS (Europe) | ||
