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RF Power Supply Option
EXO Series
EXO-13
アルバック
This unit is designed as an external oscillation source for high frequency power supplies. The rated signal can be output at a single frequency of 13.56MHz.
In addition, this unit is equipped with 1 to 4 BNC output ports, and can perform high frequency oscillation in phase with up to 4 power supplies.
* The external input terminal of the connected power supply is terminated at 50Ω and must be able to operate at 10mW or more and 100mW or less.
Features
- Possible to synchronize the phase of up to 4 RF power supplies.
- Low cost is realized by eliminating the phase shift function.
Specification
| Model | EXO-13 | |
| Input specifications | Input voltage | Single-phase AC90～110V |
| Input capacity | 10VA or less | |
| Output specifications | Oscillation frequency | 13.56MHz±0.05% |
| External dimensions W×D×H | 145×110×44mm (Excluding protrusions) | |
