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Hot Cathode Gauge
Transducer Type
SH200 Series
SH200-A / R / E
アルバック
New series of transducer type "G-RTAN series Multi Ionization Gauge" that is capable of connection to differet type sensor heads.
This product, which is a B-A type ionization vacuum gauge, can measure ultra-high vacuum.
Improved to be more user-friendly taking over the concept of wide-range measurement and low running cost.
This product, which is a B-A type ionization vacuum gauge, can measure ultra-high vacuum.
Improved to be more user-friendly taking over the concept of wide-range measurement and low running cost.
Features
- ULVAC own concept: Capable of connection of different measurement range sensor heads according to application.
- Compact: Significantly miniaturized compared to the previous series (56% reduction of controller volume). World’s smallest class.
- High usability: Set point setting, condition check, etc. by connecting PC/Android.
- Larger selection: EtherCAT spec to be available in addition to analog output spec and serial communication spec.
- Filament life notification function: An advance warning can be made before the life of ionization vacuum gauge by watching flilament power.
- Wide range measuremnt: Measurment from atmospheric pressure to ultra high vacuum (1 x 10+5 to 5 x 10-8Pa) is possible (when using with an optional unit SWU10-R).
- Precise atmospheric pressure sensing: Atmospheric pressure check for chamber open is available (when using with an optional unit SAU).
Applications
- Process control in high vaccuum range for vacuum equipments for semiconductors or electric devices.
- Ultimate pressure check for in-line or batch type vacuum equipments which have many process chambers.
- Pressure measurement for high vacuum or ultra-high vacuum equipments.
Specifications
| Model | SH200-A | SH200-R | HT200-E (scheduled for release) |
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| Type | Analog output type | Serial communication type | EtherCAT communication type | |
| Applicable ionization gauge sensor head |
M-44(NW16), M-45(NW25), M-46(ICF070) | |||
| Connectable sensors | Multi ionization gauge SH200: 1 Pirani vacuum gauge sensor unit SWU10-R: 1 (option) Pressure sensro unit SAU: 1 (option) |
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| Repeatability (N2) | SH200 simple mode: ±2％ | |||
| Sampling time | 60 ms, 5x moving average | |||
| Value output | Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade Pressure conversion equation: V=7.25+0.75×(LogP-2) P=10^{(V-7.25)/0.75+2} |
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| Update time | 60msec | |||
| Control input signals | FIL ON/OFF、FIL 1/2、DEGAS ON/OFFOperates with open collector input, negative logic | - | - | |
| Control output signals | Sensor error, Setpoint 1/2/3, Emission valid Watch of electric power of filament Rating: 24VMAX、50mAMAX Saturation voltage:1V |
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| Communication type | - | RS232C/RS-485 | EtherCAT | |
| LED display | POWER: Power, ERROR LED (Blinking pattern and color change depending on each mode) | |||
| Emission current | 1mA (1×10-3Pa or lower), 10μA (1×10-3Pa or higher) | |||
| Degas Method | Electron bombard type 1mA, 330V | |||
| Maximum pressure of sensor | 2×10+5Pa (1.5 x 10+3 Torr, 2 x 10+3 mbar) (Absolute pressure) ＊Need separate measures as a capacity to resist pressure, such as flange and clamp |
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| Internal volume of sensor | 17cm3(M-44), 19cm3(M-45), 17cm3(M-46) | |||
| Operating temperature range | 10 to 50℃ (50 to 122?) | |||
| Operating humidity range | 15 to 80% (not condensing) | |||
| Storage temperature | -20 to 65℃ (-4 to 149?) (At non-energizing, not condensing) | |||
| IP rating | IP30 | |||
| Power supply voltage | DC20 to 28V (Ripple, Noise 1% or less) Lower than 8W | |||
| Input/output connector | D-sub15-pin (M2.6 screw) | |||
| Weight | Sensor unit: approx. 280g, sensor head (M-44/45): 80g, (M-46): 300g | |||
| Dimension W x D x H | 69mm×63mm×90mm (sensor unit only) | |||
| Applicable standard | CE | |||
| Option | Multi Ionization Gauge Sensor head | M-44(NW16), M-45(NW25), M-46(ICF070) Material of gas contacting sections: Filament 1, 2 -Ir/Y2O3 Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating |
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| Pirani Vacuum Gauge | SWU10-R *Previous model SPU also available | |||
| Pirani Vacuum Gauge Sensor head | SWP-16(NW16), SWP-25(NW25), SWP-R1/8(R1/8), SWP-P18(Φ18 pipe end), SWP-P15(Φ15 pipe end), SWP-CF16(ICF034) Material of gas contacting sections : Filament-Pt, Other-BS/Ni plating, Ni, Solder |
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| Pressure switch | SAU(NW16) Material of gas contacting sections : SUS316L | |||
| Unit cable | GUC-200P (for SWU10-R) ：0.5m, 1m, 2m GUC-200A (for SAU) ：0.5m, 1m, 2m |
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| Display unit | 1CH：ISG1(DC24V) | |||
| Display cable | Cable betweeen SH200 and desiplay unit 2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m |
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| Connector | I/O connector (D-sub15-soket（M2.6mm screw)) | |||
| Others | Test certificate, Calibration certificate | |||
SH200 series have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SWU10-R), and triple combination mode with a multi ionization gauge, a pirani gauge (SWU10-R) and a pressure switch (SAU)
| Mode | SH200-A/SH200-R/SH200-E Simple mode |
SH200-A/SH200-R/SH200-E ＋SWU10-R Combination mode |
SH200-A/SH200-R/SH200-E ＋SWU10-R＋SAU Triple combination mode |
| Measurable pressure range | 5.0×10-8 to 1.0×10+1Pa | 5.0×10-8 to 1.0×10+5Pa | 5.0×10-8 to 1.0×10+5Pa |
| Accuracy | 5.0×10-8 to 1.0×10+1Pa： ±15% |
5.0×10-8 to 1.0×10-1Pa：±15% 4.0×10-1 to 3.0×10+0Pa：±10～±15% 3.0×10+0 to 1.0×10+4Pa：±10% 1.0×10+4 to 1.0×10+5Pa：±20% |
5.0×10-8 to 4.0×10-1Pa：±15% 4.0×10-1 to 3.0×10+0Pa：±10～±15% 3.0×10+0 to 1.0×10+4Pa：±10% 1.0×10+4 to 3.0×10+5Pa：±3%F.S.(3.0×10+3Pa･Base temperature: 25℃) |
| Connection image |  |
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| Measurable pressure range image | 
Triple combination can be used when “atmospheric pressure” check required to open chamber. |
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Image of coneection with PC/smartphone
Application software "UL-MOBI"
| For PC | Download from ULVAC's website "ULVAC SHOWCASE" download center |
| For smartphone | Download from Google Play |
Compatible devices
| PC | Windows 10 64 bit or later |
| Smartphone | Android 6 or later, USB TypeC |
Ordering code
contact the nearest distributor regarding other combinations than the following
| Main unit | Sensor head | Fitting type | Ordering code |
| SH200-A (analog output spec) | M-44 | NW16 | 210006962800 |
| M-45 | NW25 | 210006962900 | |
| M-46 | ICF070 | 210006963000 | |
| Without sensorhead | － | 210006963100 | |
| SH200-A + pirani unit SWU10-R combination (unit cable 5m) |
M-44/SWP-16 | NW16/NW16 | 210006969400 |
| M-45/SWP-25 | NW25/NW16 | 210006969500 | |
| M-46/ SWP-CF16 | ICF070/ICF034 | 210006969600 | |
| SH200-R (serial communication spec) | M-44 | NW16 | 210006963500 |
| M-45 | NW25 | 210006963600 | |
| M-46 | ICF070 | 210006963700 | |
| Without sensorhead | － | 210006963800 |
該非判定結果報告書 Download
SDS Download
Accessories and Consumables
Hot Cathode Gauge General Transducer Type for SH200 Series
Gauge M-44(NW16)
Gauge M-45(NW25)
Gauge M-46(ICF070)
