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Pirani Vacuum Gauge
Transducer Type
SP1
SP1
アルバック
The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
Features
- Transducer type that saves cost and space
- Easy replacement of sensor head
- Platinum filament which has excellent corrosion resistance
- Sensor heads you have been using (WP-01, 02, 03, 16) can be used as is.
- Set-point output 2 points
- Measurement value output DC 0 to 5V (non-linear)
- Power supply voltage DC24V
Applications
- Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
- Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
- Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.
Specifications
| Type | Sensor unit |
| Model | SP1 |
| Compatible sensor head | WP-01, WP-02, WP-03, WP-16 |
|
Accuracy |
±15 %（51 Pa ～760 Pa） |
| ±30 %（10 Pa ～1000 Pa） | |
| ±50 %（0.4 Pa ～3000 Pa） | |
| Operating temperature range | 10 ~ 40℃ |
| Measurement value output | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Setpoint 1/2 Pressure setting adjustment monitor | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Control output signal | Open collector output, Negative logic |
| ERROR signal | |
| Setpoint 1/2 | |
| LED display | Power, error, set point 1, set point 2 |
| Power supply voltage | DC24V±2V, 90mA（Max.） |
| Input/Output connector | D-sub-15P（M2.6 screw） |
| Weight | 190g /0.41lb (Excluding sensor head) |
|
Standard accessories |
Input/Output connector 1pc |
| Quick manual 1pc |
IO and analog GND are not isolated from the power GND.
該非判定結果報告書 Download
SDS Download
Accessories and Consumables
Pirani Vacuum Gauge Transducer Type for SP1
Gauge WP-01(Φ18)
Gauge WP-02(Φ15)
Gauge WP-03(R3/8)
Gauge WP-16(NW16)
