SP1|SP1|Transducer Type|Pirani Vacuum Gauge|Vacuum Gauge|Products|ULVAC SHOWCASE

Pirani Vacuum Gauge

Transducer Type

SP1

SP1

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The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).

Features

  • Transducer type that saves cost and space
  • Easy replacement of sensor head
  • Platinum filament which has excellent corrosion resistance
  • Sensor heads you have been using (WP-01, 02, 03, 16) can be used as is.
  • Set-point output 2 points
  • Measurement value output DC 0 to 5V (non-linear)
  • Power supply voltage DC24V

Applications

  • Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
  • Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
  • Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Specifications

Type Sensor unit
Model SP1
Compatible sensor head WP-01, WP-02, WP-03, WP-16

Accuracy

±15 %(51 Pa ~760 Pa)
±30 %(10 Pa ~1000 Pa)
±50 %(0.4 Pa ~3000 Pa)
Operating temperature range 10 ~ 40℃
Measurement value output Nonlinear output: 0 to 5VDC (Max. 10V)
Setpoint 1/2 Pressure setting adjustment monitor Nonlinear output: 0 to 5VDC (Max. 10V)
Control output signal Open collector output, Negative logic
ERROR signal
Setpoint 1/2
LED display Power, error, set point 1, set point 2
Power supply voltage DC24V±2V, 90mA(Max.)
Input/Output connector D-sub-15P(M2.6 screw)
Weight 190g /0.41lb (Excluding sensor head)

Standard accessories

Input/Output connector 1pc
Quick manual 1pc

IO and analog GND are not isolated from the power GND.

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Pirani Vacuum Gauge Transducer Type for SP1
Gauge WP-01(Φ18) Gauge WP-02(Φ15) Gauge WP-03(R3/8) Gauge WP-16(NW16)

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

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