Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type



Standard type / Single-stages / with power cord / with switch / with thermal protector


Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.
Pump structure makes Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.


  • Vacuum chucks, wafer and tip handling devices.
  • Vacuum tweezers, medical appliances.
  • Printing equipment.
  • Automatic packing machines.
  • Optical appliances.
  • Semiconductor industry.
  • Injection molding machine.


Unit 50Hz 60Hz
Actual pumping speed
L/min 60 72
Ultimate pressure※1
Pa (kPa) 21.3×103 (-80.0)
  Single phase, 100V, 200W, 4P, Split phase starting
Full load current
A 5.6 5.0
kg 11.0
Inlet,outlet pipe diameter(Female)
mm O.D.Φ9×I.D.Φ5 (Rc 1/4)
Ambient temperature
External dimensions
mm 212(W)×278(L)×224.5(H)
※1:The gauge pressure display is shown in () of Ultimate pressure.

Corresponding certificate/Voltage

Model Applicable standard CE
Declartion of confirmity




●:Standard、○:Option、-:Not Applicable


The pump is stopped when the lord is operated, and the pump can’t be operated just after that.
In this case, please return the atmospheric pressure the inside of the pump.
The pump will not often operate normally if it is used with corrosive gases, organic solvents, liquids, or condensed gases (eg steam).
The pump will not often operate normally if it is used with gases containing particles or dust etc.
A large current flows when the pump starts.
If ON/OFF of the pump power supply will be frequently done in a short time, trouble might be caused.
Please do not turn a frequent power supply on and off in a short time.
It is a pump only in the room.
Please do not set it up in the place, that rain and water splash, and outdoors.

Dimension drawing


> CAD data download(DXF)

Pumping Speed Curves


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