Oil Rotary Vacuum Pump Model:VS300A-W
ULVAC
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VS300A-W is classified as a rotary vane type Oil Rotary Vacuum pump. Smallest footprint in the class and allows the direct mounting of Mechanical booster pump. In addition, stable exhaust performance is obtained by the Oil mist separator and Oil return mechanism which is build-in into the pump. In addition, it is designed with an easy maintainability for oil and element filter exchanges.
Features
- Smallest footprint in the class
Compact design of 874×404mm. - Mechanical booster pump allowed to be directly mounted
MBP mount kit allows a direct mounting without frame. - Built-in oil mist separator
Oil mist separator is build-in in standard. - Oil return mechanism
Structure that prevents oil from leaking to the outside even in the event of oil leakage from the shaft seal section. - IE3 high-efficiency multi-voltage motor installed
Wide range of voltages are supported with a single motor.
Applications
- Optical film vapor deposition system
- Thin film vapor deposition system for reflector
- Evaporation system for decorative moldings
- Evaporation Roll Coater systems
- In-line sputtering systems
- Vacuum Heat treatment furnace systems
- Vacuum Freeze-drying system
- Vacuum Leak testers
- Space chambers
Specifications
| Model | VS300A-W | |||
| Designed pumping speed | 50Hz | m3 / hr (L/min) |
250 (4,166) | |
| 60Hz | 300 (5,000) | |||
| Ultimate pressure*１ | GP Close | Pa | ≦15 | |
| GP Open | ≦200 | |||
| Power consumption (at ultimate pressure） |
50Hz | kW | 2.8 | |
| 60Hz | 3.1 | |||
| Motor | Model | Totally enclosed fan cooled / 3 phase induction motor | ||
| Capacity | kW(Poles） | 7.5（４） | ||
| Voltage | 50Hz | V | 200～240 / 380～415 | |
| 60Hz | 200～240 / 380～460 | |||
| Noise level*２ (at ultimate pressure） |
50Hz | dB | 70 | |
| 60Hz | 74 | |||
| Oil | ULVOIL R-72 | |||
| Oil capacity | L | 10～15 | ||
| Cooling method | Water cooled | |||
| Cooling water | Primary pressure | MPaG | ≦0.3 | |
| Differential pressure between inlet and outlet | ≧0.1 | |||
| Cooling water volume | L/min | ≧3.0 | ||
| Cooling water temperature | ℃ | 5~30 | ||
| Cooling water Δｔ | ≦25 | |||
| Inlet port flange | DN 63 ISO-F | |||
| Outlet port flange | G2 | |||
| Weight | kg | 270 | ||
| External dimensions W×D×H | mm | 404×871×585 | ||
| Overseas safety standards | CE、 cTUVus | |||
Note ) This specification uses SI measurement unit.
*1 Ultimate pressure in above is when slow leak valve is open. Ultimate pressure achieves ≦ 8Pa when slow leak valve is closed.
*2 The average sound pressure level has measured and calculated based on ISO 2151.
Pumping Speed Curves
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