Vacuum Angle Valve Model: VLPｰU36
ULVAC
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ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Specifications
| Model | VLP-U |
| Maximum allowable differential pressure on valve plate (Positive pressure) MPa |
0.10 |
| Maximum allowable differential pressure on valve plate （Counter pressure） n/a |
Not available |
| Maximum allowable differential pressure in opening direction （Positive pressure） kPa |
1.0 |
| Maximum allowable differential pressure in opening direction （Counter pressure） n/a |
Not available |
| Plate seal | O-ring |
| Feedthrough | O-ring |
| Actuation | Double-acting cylinder |
| External leak rate*1 Pa・m3/s | ≦1.3E-7 |
| Internal leak rate*1 Pa・m3/s | ≦1.3E-7 |
| Operating pressure range（absolute pressure） Pa | Atm. - 1.0E-5 |
| Bakeout temperature(when stopping)*2 ℃ | 60 |
| Operating ambient temperature ℃ | 5 - 40 |
| Fluid temperature ℃ | 5 - 40 |
| Heating & cooling speed ℃/h | ≦30 |
| Operating ambient | Non-corrosive |
| Fluid | Non-corrosive |
| Compressed air to cylinder MPaG | 0.40 - 0.55 |
| Warranted operation cycle*3 | 100,000 |
| Orientation | Vertical |
| Position indicator | Optional (sell separately) |
| Material of major parts (Vacuum side) | Steel 400 with Ni plating |
| Material of major parts (Atmosphere side) | Steel 400 with Ni plating + acrylic painting |
| Seal material (Vacuum side) | Nitrile rubber |
| Grease (Vacuum side) | Highly purified paraffin oil |
| Attachment for lifting | None/td> |
| RoHS | Complied |
Detail of specification VLP-U
| Flange | VF500 |
| Conductance in opening position*4 L/s | 9,198 |
| Cylinder capacity cc | 9,040 |
| Compressed air fitting | Rc3/4 |
| Operating speed (open) *5 sec | 7.0±0.5 |
| Operating speed (close) *5 sec | 7.0±0.5 |
| Weight kg | 310 |
| Height dimension (A) mm | 1,530 |
| Center-to-flange dimension (B) mm | 380 |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 See instruction manual for detail.
*4 Conductance is based on molecular flow at 20℃ (68F) air.
*5 Adjust operation speed to make its value equal to specified value by using a speed controller.
