Fundamentals of Vacuum Valves
ULVAC's L-shaped vacuum angle valve is manufactured in stainless steel and line-up full range of JIS flange specifications. Open/Close parts are double-acting or single-acting cylinders and manually. Connecting flange types are 4 types, of which size ranges are 16A (5/8inch) to 900A (36inch).
* Dimensions between surfaces for cylinder pressure air apply port size are not compatible with some older models
Table of Contents
- Operation Methods and Working Pressure
- Cylinder Structure
- Position Indicator
- Solenoid Valve for Operation
|VLP-SA Vacuum angle valve(Double-acting/Stainless Steel/O-ring shaft feedthrough)|
|VLP-SB Vacuum angle valve(Double-acting/Stainless Steel/bellows feedthrough)|
|VLP-MB Vacuum angle valve（Double-acting/Stainless Steel/UHV）|
|VLP-U Vacuum angle valve（Double-acting/Steal/O-ring shaft feedthrough）|
|VLB-SA Vacuum angle valve(Single-acting/Stainless Steel/O-ring shaft feedthrough)|
|VLB-SB Vacuum angle valve(Single-acting/Stainless Steel/bellows feedthrough)|
|VLH Vacuum angle valve(Manual)||VLH-SB Vacuum angle valve(Manual/Stainless Steel/bellows feedthrough)|
|VLH-MB Vacuum angle valve（Manual/Stainless Steel/UHV）|
|Series||Vacuum level *1||Pressure range abs
|Type||Actuation||Body material||Bakeout temperature
|Allowable pressure difference
|VLP-SA||V||Atm. ～ [1.0E-5] <1.0E-7> (7.5E-8)||Angle||Double-acting||SUS304||150||0.1|
|VLP-SB||HV||Atm. ～ [1.0E-6] <1.0E-8> (7.5E-9)|
|VLP-MB||UHV||Atm. ～[1.0E-8] <1.0E-10> (7.5E-11)||150(200)|
|VLP-U||V||Atm. ～[1.0E-5] <1.0E-7> (7.5E-8)||SS400+
|VLB-SA||Single-acting NC *3||SUS304||150||0.1|
|VLB-SB||HV||Atm. ～[1.0E-6] <1.0E-8> (7.5E-9)|
|VLH-MB||UHV||Atm. ～[1.0E-8] <1.0E-10> (7.5E-11)||150(200)|
*1 Refer to "Feedthrough" about relationship between vacuum level and feedthrough.
*2 Actuator < 60°C<140F>.
*3 NC = Normally closed (Valve automatically closes when compressed air released).
Supported operation systems are three types supporting 0.10MPa;
- Double Acting Cylinder
- Single Acting Cylinder
Double-acting: DA（double acting)
Single-acting (normally closed)
Seal structure types are O-ring-Type or Bellows-Type.
- The feedthrough of VL□-SA is O-ring (FKM)shaft feedthrough, which endures particles.
- The feedthrough of VLP-U is O-ring (NBR) shaft feedthrough, which endures particles.
- The feedthrough of VL□-SB is bellows feedthrough, which minimizes outgassing.
- The Bonnet flange seal of VLP-MB is metal, making it possible to bake out at 200˚C (392F) in the opening position.
The connection flange lineups 4 types and size variety are 16A to 350A manufactured in stainless steel(*1); JIS-VF, JIS-KF, ISO-K, ISO-CF.
The large size of over 500A is manufactured in structure steel(*2).
(*1) O-ring is fluoro rubber: FKM.
(*2) O-ring is nitrile rubber: NBR.
◆ Nominal diameter: A (ISO) mm
◇ Nominal diameter: A (Conventional JIS) mm
● Nominal diameter: B inch
|Position indicator type||Lead switch (double wire system, contact switch, cable length 1m (3.28 feet))||Lead switch (double wire system, contact switch, cable length 1m (1.64 feet))|
|Contact capacity of the position indicator||DC24V/5～50mA
|Contact capacity of the position indicator||Lead switch LED indicator|
|Valve mounting||No mounting||with mounting|
- <*>The old VLP solenoid valve can be used for the new valve.
- When the solenoid valve for the old VLP-U6, VLP-U14, and VLP-U14R is diverted to the new valve, the operation time may be slightly delayed.
- Solenoid valves are not available in the new lineup.
Fundamentals of Vacuum Valves
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- Fundamentals of Molecular Interaction Analyzer QCM
- The Others
- How to Choose The Best Products
- Old Models vs. New Models