Fundamentals of Vacuum Valves

ULVAC's vacuum angle valve (L-type valve) is unified with SUS, and in addition to the current JIS flange specifications, it has a full range of ISO flanges, open / close to double acting / single acting cylinders manually, 4 types of connecting flange types, The lineup can meet a wide range of needs from 16A (5 / 8inch) to 900A (36inch).


※* Dimensions between surfaces for cylinder pressure air supply port size is not compatible with some older models.

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Operation method and working pressure

Category Series

VLP Vacuum angle valve(Double-acting)

VLP-SA Vacuum angle valve(Double-acting / Stainless Steel / O-ring shaft feedthrough)
VLP-SB Vacuum angle valve(Double-acting / Stainless Steel / bellows feedthrough)
VLP-MB Vacuum angle valve(Double-acting / Stainless Steel / UHV)
VLP-U Vacuum angle valve(Double-acting / Steal / O-ring shaft feedthrough)

VLB Vacuum angle valve(Single-acting)

VLB-SA Vacuum angle valve(Single-acting / Stainless Steel / O-ring shaft feedthrough)
VLB-SB Vacuum angle valve(Single-acting / Stainless Steel / bellows feedthrough)
VLH Vacuum angle valve(Manual) VLH-SB Vacuum angle valve(Manual / Stainless Steel / bellows feedthrough)
VLH-MB Vacuum angle valve(Manual / Stainless Steel / UHV)

Series Vacuumlevel *1 Pressure range abs
[Pa] (torr)
Type Actuation Body material Bakeout temperature
[℃]*2
Allowable pressure difference
[MPa]
VLP-SA V Atm. ~ [1.0E-5] <1.0E-7> (7.5E-8) Angle Double-acting SUS304 150 0.1
VLP-SB HV Atm. ~ [1.0E-6] <1.0E-8> (7.5E-9)
VLP-MB UHV Atm. ~[1.0E-8] <1.0E-10> (7.5E-11) 150(200)
VLP-U V Atm. ~[1.0E-5] <1.0E-7> (7.5E-8) SS400+
Ni plating
60 n/a
VLB-SA Single-acting NC*3 SUS304 150 0.1
VLB-SB HV Atm. ~[1.0E-6] <1.0E-8> (7.5E-9)
VLH-SB Manual
VLH-MB UHV Atm. ~[1.0E-8] <1.0E-10> (7.5E-11) 150(200)

*1 Refer to "Feedthrough" about relationship between vacuum level and feedthrough.
*2 Actuator < 60°C<140F>.
*3 NC = Normally closed (Valve automatically closes when compressed air released).

Operation system: Cylinder structure

The operation system can be selected from three types: "double acting cylinder", "single acting cylinder", and "manual".(0.10MPa) is supported.

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Double-acting:DAdouble acting)

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Single-acting (normally closed)

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Feedthrough

Seal structure can be selected from "O-ring type" and "Bellows type".

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Structural drawing seal-structure-a1.png seal-structure-b1.png seal-structure-c1.png seal-structure-d1.png
Vacuum level/
Working pressure
V ≦10-5Pa V ≦10-5Pa V ≦10-5Pa V ≦10-5Pa
HV ≦10-6Pa HV ≦10-6Pa HV ≦10-6Pa HV ≦10-6Pa
UHV ≦10-8Pa UHV ≦10-8Pa UHV ≦10-8Pa UHV ≦10-8Pa
XHV ≦10-9Pa XHV ≦10-9Pa XHV ≦10-9Pa XHV ≦10-9Pa
Series VLP-SA
VLB-SA
VLP-U
VLP-SB
VLH-SB
VLB-SB
VLP-MB
VLH-MB
VUH
  • Feedthrough of VL□-SA is O-ring (FKM)shaft feedthrough, which endures particle.
  • Feedthrough of VLP-U is O-ring (NBR) shaft feedthrough, which endures particle.
  • Feedthrough of VL□-SB is bellows feedthrough, which minimize outgassing.
  • Bonnet flange seal of VLP-MB is metal which makes possible to bake out at 200˚C (392F) in opening position.

Flange

The connection flange can be selected from four types: "JIS-VF", "ISO-KF", "ISO-K", and "ISO-CF". The flange size is 16A to 350A are made of SUS (O-ring is fluoro rubber: FKM).Large size over 500A is made of SS (O-ring is nitrile rubber: NBR)is unified

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*1 Numerical number used for model is:  ◆"Nominal diameter: A (ISO) mm", ◇ "Nominal diameter: A (conventional JIS) mm", ●"Nominal diameter: B inch".

■ISO-KF
KF...Klein Flansch
Standard: ISO 2861(clamped-type quick-release couplings)
Aka: Quick coupling

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■ISO-K
K...Klampe
Standard: ISO 1609 / JIS B2290 (clamping flange)
Aka: MF flange, LF flange Connection to ISO-F is possible with claw clamp

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■JIS-VF/VG
Standard: JIS B2290 (clamped-type quick-release couplings)
VF: Without O-ring groove
VG: With O-ring groove

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■ISO-CF
CF...ConFlat
Standard: ISO 3669-2 (knife edge flange)
Aka: Bakable flange, UFC flange, ICF flange

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Position indicator(option)

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Applicable valve VLP-SA/SB/MB
VLB-SA/SB
VLP-U20/U22 VLP-U36
Model W8H D-A54/BT-16(SMC) D-A54/BT-20(SMC)
Position indicator type Lead switch (double wire system, contact switch, cable length 1m (3.28 feet)) Lead switch (double wire system, contact switch, cable length 1m (1.64 feet))
Contact capacity of position indicator DC24V/5~50mA
AC110V/5~20mA
DC24V/5~50mA
AC100V/5~25mA
AC200V/5~12.5mA
Contact capacity of position indicator Lead switch LED indicator
Valve mounting No mounting with mounting

Recommended solenoid valve for valve operation

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  • <*>The old VLP solenoid valve can be used for the new valve.
  • However, if the solenoid valve for the old VLP-U6, VLP-U14, and VLP-U14R is diverted to the new valve, the operation time may be slightly delayed.

※Selonoid valve are not available in the new lineup, please prepare by customer.

Fundamentals of Vacuum Valves

HOW TO

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