L-Shaped Vacuum Angle Valve

Table of Contents

1. Operation Methods and Working Pressure
2. Cylinder Structure
3. Feedthrough
4. Flange
5. Position Indicator
6. Solenoid Valve for Operation

Operation Methods and Working Pressure

*1 Refer to "Feedthrough" about relationship between vacuum level and feedthrough.
*2 Actuator < 60°C<140F>.
*3 NC = Normally closed (Valve automatically closes when compressed air released).

Cylinder structure

Supported operation systems are three types supporting 0.10MPa;

• Double Acting Cylinder
• Single Acting Cylinder
• Manual

Feedthrough

Seal structure types are O-ring-Type or Bellows-Type.

Structural drawing
Vacuum level/ Working pressure	V	≦10-5Pa	V	≦10-5Pa	V	≦10-5Pa	V	≦10-5Pa
	HV	≦10-6Pa	HV	≦10-6Pa	HV	≦10-6Pa	HV	≦10-6Pa
	UHV	≦10-8Pa	UHV	≦10-8Pa	UHV	≦10-8Pa	UHV	≦10-8Pa
	XHV	≦10-9Pa	XHV	≦10-9Pa	XHV	≦10-9Pa	XHV	≦10-9Pa
Series	VLP-SA VLB-SA VLP-U		VLP-SB VLH-SB VLB-SB		VLP-MB VLH-MB		VUH

• The feedthrough of VL□-SA is O-ring (FKM)shaft feedthrough, which endures particles.
• The feedthrough of VLP-U is O-ring (NBR) shaft feedthrough, which endures particles.
• The feedthrough of VL□-SB is bellows feedthrough, which minimizes outgassing.
• The Bonnet flange seal of VLP-MB is metal, making it possible to bake out at 200˚C (392F) in the opening position.

Flange

The connection flange lineups 4 types and size variety are 16A to 350A manufactured in stainless steel(*1); JIS-VF, JIS-KF, ISO-K, ISO-CF.
The large size of over 500A is manufactured in structure steel(*2).

(*1) O-ring is fluoro rubber: FKM.
(*2) O-ring is nitrile rubber: NBR.

◆ Nominal diameter: A (ISO) mm
◇ Nominal diameter: A (Conventional JIS) mm
● Nominal diameter: B inch

Position indicator（option）