Introduction of vacuum equipments manufactured by ULVAC Group.
For more information on ULVAC products, purchase, and/or consideration, click here.
A vacuum valve is a valve used to control a vacuum environment. It is mainly used to adjust, stop, or release the flow of gas in a vacuum system (e.g. vacuum pump or vacuum device). In a vacuum environment, work is carried out at a pressure much lower than normal air pressure, so the valves are designed to be tightly sealed and to prevent gas leakage.
Type
Vacuum Angle Valve
ULVAC's vacuum angle valves (L-type valves) are all made of SUS, and in addition to the current JIS flange specifications, we have a wide range of ISO flanges, and the opening and closing can be done with double-acting and single-acting cylinders or manually, with four types of connection flanges and sizes ranging from 16A (5/8 inch) to 900A (36 inch), making this a lineup that can meet a wide range of needs.
Vacuum Angle Valve
Model: VLPｰSA020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA200JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA250JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA350JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA200KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSA250KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB200JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB250JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB200KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB250KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰSB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰMB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰMB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰMB063CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰMB100CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰMB160CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰU20
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰU22
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLPｰU36
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSA016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSA025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSA040KF
Stainless steel made valve from 5/8 - 2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is ISO-KF.
Vacuum Angle Valve
Model: VLBｰSA050KF
Stainless steel made valve from 5/8 - 2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is ISO-KF.
Vacuum Angle Valve
Model: VLBｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLBｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰSB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰMB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰMB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰMB063CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰMB100CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model: VLHｰMB160CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Gate Valve
Pendulum Valve
The pendulum valve is a large gate valve developed by ULVAC using its own technology.
It can be used in large vacuum equipment such as film deposition equipment for displays.
Pendulum Valve
Model: VFR
ULVAC's "Model:VFR" Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Pendulum Valve
Model: VFR-400
ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Pendulum Valve
Model: VFR-500
ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.