VLPｰU36

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ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.

Specifications

Model	VLP-U
Maximum allowable differential pressure on valve plate (Positive pressure) MPa	0.10
Maximum allowable differential pressure on valve plate （Counter pressure） n/a	Not available
Maximum allowable differential pressure in opening direction （Positive pressure） kPa	1.0
Maximum allowable differential pressure in opening direction （Counter pressure） n/a	Not available
Plate seal	O-ring
Feedthrough	O-ring
Actuation	Double-acting cylinder
External leak rate*¹ Pa・m³/s	≦1.3E-7
Internal leak rate*¹ Pa・m³/s	≦1.3E-7
Operating pressure range（absolute pressure） Pa	Atm.～1.0E-5
Bakeout temperature(when stopping)*² ℃	60
Operating ambient temperature 　℃	5～40
Fluid temperature　℃	5～40
Heating & cooling speed ℃/h	≦30
Operating ambient	Non-corrosive
Fluid	Non-corrosive
Compressed air to cylinder MPaG	0.40～0.55
Warranted operation cycle*³	100,000
Orientation	Vertical
Position indicator	Optional (sell separately)
Material of major parts (Vacuum side)	Steel 400 with Ni plating
Material of major parts (Atmosphere side)	Steel 400 with Ni plating + acrylic painting
Seal material (Vacuum side)	Nitrile rubber
Grease (Vacuum side)	Highly purified paraffin oil
Attachment for lifting	None/td>
RoHS	Complied

Detail of specification 　VLP-U

Flange	VF500
Conductance in opening position*⁴　L/s	9,198
Cylinder capacity　cc	9,040
Compressed air fitting	Rc3/4
Operating speed (open) *⁵　sec	7.0±0.5
Operating speed (close) *⁵　sec	7.0±0.5
Weight　kg	310
Height dimension (A)　mm	1,530
Center-to-flange dimension (B)　mm	380

*1　Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2　Do not open and close during bakeout.
*3　See instruction manual for detail.
*4　Conductance is based on molecular flow at 20℃ (68F) air.
*5　Adjust operation speed to make its value equal to specified value by using a speed controller.