SHOWCASE

Vacuum Angle Valve

Double Acting

VLP Series

VLPーU20

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ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.

Specifications

Model VLP-U
Maximum allowable differential pressure on valve plate
(Positive pressure) MPa
0.10
Maximum allowable differential pressure on valve plate
(Counter pressure) n/a
Not available
Maximum allowable differential pressure in opening direction
(Positive pressure) kPa
1.0
Maximum allowable differential pressure in opening direction
(Counter pressure) n/a
Not available
Plate seal O-ring
Feedthrough O-ring
Actuation Double-acting cylinder
External leak rate*1 Pa・m3/s ≦1.3E-7
Internal leak rate*1 Pa・m3/s ≦1.3E-7
Operating pressure range(absolute pressure) Pa Atm.~1.0E-5
Bakeout temperature(when stopping)*2 60
Operating ambient temperature  ℃ 5~40
Fluid temperature ℃ 5~40
Heating & cooling speed ℃/h ≦30
Operating ambient Non-corrosive
Fluid Non-corrosive
Compressed air to cylinder MPaG 0.40~0.55
Warranted operation cycle*3 100,000
Orientation Vertical
Position indicator Optional (sell separately)
Material of major parts (Vacuum side) Steel 400 with Ni plating
Material of major parts (Atmosphere side) Steel 400 with Ni plating + acrylic painting
Seal material (Vacuum side) Nitrile rubber
Grease (Vacuum side) Highly purified paraffin oil
Attachment for lifting None/td>
RoHS Complied

Detail of specification  VLP-U

Flange VF500
Conductance in opening position*4 L/s 9,198
Cylinder capacity cc 9,040
Compressed air fitting Rc3/4
Operating speed (open) *5 sec 7.0±0.5
Operating speed (close) *5 sec 7.0±0.5
Weight kg 310
Height dimension (A) mm 1,530
Center-to-flange dimension (B) mm 380

*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 See instruction manual for detail.
*4 Conductance is based on molecular flow at 20℃ (68F) air.
*5 Adjust operation speed to make its value equal to specified value by using a speed controller.

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