Pressure Conversion Chart|Vacuum Tech Basics|How to|ULVAC SHOWCASE

Vacuum Tech Basics

It is a pressure convert chart.

1. Pressure Unit Conversion

Pa (N/m2 Torr (mmHg) bar kg/cm2 psi atm
Pa(N/m2 1 7.5×10-3 1×10-5 1.02×10-5 1.45×10-4 9.87×10-6
Torr (mmHg) 133 1 1.33×10-3 1.36×10-3 1.93×10-2 1.32×10-3
bar 1×105 750 1 1.02 14.5 0.987
kg/cm2 9.80×104 735 0.98 1 14.2 0.968
psi 6.89×103 51.7 6.89×10-2 7.03×10-2 1 6.80×10-2
atm 1.01×10-5 760 1.01 1.03 14.7 1
notes)1 lb・in-2 = 144 lb・ft-2,1 short ton ・ft-2 = 0.945 08 atm
    psi: pound per square inch

2. Pumping Speed and Conductance Unit Conversion

m3/s L/s L/min cm3/s
m3/s 1 103 6×104 106
L/s 10-3 1 60 103
L/min 1.667×10-5 1.667×10-2 1 16.67
cm3/s 10-6 10-3 0.06 1

3. Flow Unit Conversion

Pa・m3/s Torr・L/s atm・cm3/s molecule/s
Pa・m3/s 1 7.500 62 9.869 23 2.651 65×1020
Torr・L/s 0.133 322 1 1.315 79 3.535 23×1019
atm・cm3/s 0.101 325 0.76 1 2.686 78×1019
molecule/s 3.771 24×10-21 2.828 67×10-20 3.721 92×10-20 1

A molecule is the ideal gas(value at 0℃)

4. Thermal Unit Conversion Factor

Volume MKS unit Industrial unit CGS unit
Calorie 1 (J) 0.238 9×10-3 (kcal) 0.238 9 (cal)
Heat flow 1 (W) 0.86 (kcal・h-1 0.238 9 (cal・s-1
Thermal conductivity 1 (W・m-1・K-1 0.86 (kcal・m-1・h-1・℃ -1 0.238 9×10-2 (cal・cm-1・s-1・K-1
Thermal specific resistance 1 (m・K・W-1 1.163 (m・h・℃ ・kcal-1 4.186× 102 (cm・s・K・cal-1
Thermal resistance 1 (K・W-1 1.163 (h・℃ ・kcal-1 4.186× 102 (s・K・cal-1
Surface heat transfer rate 1 (W・m-2・K-1 0.86 (kcal・m-2・h-1・℃ -1 0.238 9×10-8 (cal・cm-2・s-1・K-1
Specific surface heat resistance 1 (m2・K・W-1 1.163 (m2・h・℃ ・kcal-1 4.186× 108 (cm2・s・K・cal-1
Surface thermal resistance 1 (K・W-1 1.163 (h・℃ ・kcal-1 4.186× 104 (s・K・cal-1
Geometric resistance 1 (m-1 1 (m-1 10-2 (cm-1
Heat capacity 1 (J・K-1 0.238 9×10-3 (kcal・℃ -1 0.238 9 (cal・K-1
Specific heat 1 (J・kg-1・K-1 0.238 9×10-3 (kcal・kg-1・℃ -1 0.238 9×10-3 (cal・g-1・K-1
Volume specific heat 1 (J・m-3・K-1 0.238 9×10-3 (kcal・m-3・℃ -1 0.238 9×10-12 (cal・cm-3・K-1

5. Pumping Volume Unit Conversion

Pa・m3 Pa・L Torr・L L(standard)
Pa・m3 1 1×103 7.52 9.87×10-3
Pa・L 1×10-3 1 7.52×10-3 9.87×10-6
Torr・L 1.33×10-1 133 1 1.32×10-3
L(standard) 1.01×102 1.01×105 760 1

6. Temperature Unit Conversion

K ℃+273.15
°F (9/5)℃+32

HOW TO

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