Vacuum Tech Basics
Pressure Conversion Chart
It is a pressure convert chart.
1. Pressure Unit Conversion
Pa (N/m2) | Torr (mmHg) | bar | kg/cm2 | psi | atm | |
---|---|---|---|---|---|---|
Pa(N/m2) | 1 | 7.5×10-3 | 1×10-5 | 1.02×10-5 | 1.45×10-4 | 9.87×10-6 |
Torr (mmHg) | 133 | 1 | 1.33×10-3 | 1.36×10-3 | 1.93×10-2 | 1.32×10-3 |
bar | 1×105 | 750 | 1 | 1.02 | 14.5 | 0.987 |
kg/cm2 | 9.80×104 | 735 | 0.98 | 1 | 14.2 | 0.968 |
psi | 6.89×103 | 51.7 | 6.89×10-2 | 7.03×10-2 | 1 | 6.80×10-2 |
atm | 1.01×10-5 | 760 | 1.01 | 1.03 | 14.7 | 1 |
psi: pound per square inch
2. Pumping Speed and Conductance Unit Conversion
m3/s | L/s | L/min | cm3/s | |
m3/s | 1 | 103 | 6×104 | 106 |
L/s | 10-3 | 1 | 60 | 103 |
L/min | 1.667×10-5 | 1.667×10-2 | 1 | 16.67 |
cm3/s | 10-6 | 10-3 | 0.06 | 1 |
3. Flow Unit Conversion
Pa・m3/s | Torr・L/s | atm・cm3/s | molecule/s | |
Pa・m3/s | 1 | 7.500 62 | 9.869 23 | 2.651 65×1020 |
Torr・L/s | 0.133 322 | 1 | 1.315 79 | 3.535 23×1019 |
atm・cm3/s | 0.101 325 | 0.76 | 1 | 2.686 78×1019 |
molecule/s | 3.771 24×10-21 | 2.828 67×10-20 | 3.721 92×10-20 | 1 |
A molecule is the ideal gas(value at 0℃)
4. Thermal Unit Conversion Factor
Volume | MKS unit | Industrial unit | CGS unit |
---|---|---|---|
Calorie | 1 (J) | 0.238 9×10-3 (kcal) | 0.238 9 (cal) |
Heat flow | 1 (W) | 0.86 (kcal・h-1) | 0.238 9 (cal・s-1) |
Thermal conductivity | 1 (W・m-1・K-1) | 0.86 (kcal・m-1・h-1・℃ -1) | 0.238 9×10-2 (cal・cm-1・s-1・K-1) |
Thermal specific resistance | 1 (m・K・W-1) | 1.163 (m・h・℃ ・kcal-1) | 4.186× 102 (cm・s・K・cal-1) |
Thermal resistance | 1 (K・W-1) | 1.163 (h・℃ ・kcal-1) | 4.186× 102 (s・K・cal-1) |
Surface heat transfer rate | 1 (W・m-2・K-1) | 0.86 (kcal・m-2・h-1・℃ -1) | 0.238 9×10-8 (cal・cm-2・s-1・K-1) |
Specific surface heat resistance | 1 (m2・K・W-1) | 1.163 (m2・h・℃ ・kcal-1) | 4.186× 108 (cm2・s・K・cal-1) |
Surface thermal resistance | 1 (K・W-1) | 1.163 (h・℃ ・kcal-1) | 4.186× 104 (s・K・cal-1) |
Geometric resistance | 1 (m-1) | 1 (m-1) | 10-2 (cm-1) |
Heat capacity | 1 (J・K-1) | 0.238 9×10-3 (kcal・℃ -1) | 0.238 9 (cal・K-1) |
Specific heat | 1 (J・kg-1・K-1) | 0.238 9×10-3 (kcal・kg-1・℃ -1) | 0.238 9×10-3 (cal・g-1・K-1) |
Volume specific heat | 1 (J・m-3・K-1) | 0.238 9×10-3 (kcal・m-3・℃ -1) | 0.238 9×10-12 (cal・cm-3・K-1) |
5. Pumping Volume Unit Conversion
Pa・m3 | Pa・L | Torr・L | L(standard) | |
---|---|---|---|---|
Pa・m3 | 1 | 1×103 | 7.52 | 9.87×10-3 |
Pa・L | 1×10-3 | 1 | 7.52×10-3 | 9.87×10-6 |
Torr・L | 1.33×10-1 | 133 | 1 | 1.32×10-3 |
L(standard) | 1.01×102 | 1.01×105 | 760 | 1 |
6. Temperature Unit Conversion
K | ℃+273.15 |
---|---|
°F | (9/5)℃+32 |
Vacuum Tech Basics
HOW TO
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- The Others
- How to Choose The Best Products
- Old Models vs. New Models
- Troubleshooting