EGKｰ3

ULVAC

EGK-3 electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements. This evaporation source has a hearth with a maximum input power of 5kW.
The crucible has a capacity of 3 cc, which is suitable for experiments and small-scale production.

Features

Suitable for small-scale production due to the 3cc hearth capacity.
Since the electron beam is deflected by the electromagnetic field, the influence of secondary electrons on the deposition target is extremely small.
By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)
The electron beam is deflected 225°, so it is not exposed to the vapor from the vaporized material and the filament has a long life.
Since the emitter assembly can be easily attached and detached, it is easy to replace the consumable parts such as filament and insulator.

Specifications

Acceleration voltage		-4kV～-10kV DC
Beam current		0.5A max (at -10kV)
Maximum input		5kW（-10kV、0.5A）
X-axis deflection coil		0.4～3.5A -18VDCmax 22Ω（20℃）
Filament		0～6V AC 40Amax
Crucible	Volume	2.6cc
	Size	21Φ×15.6Φ×10H
Beam deflection angle		225°
Effective evaporation angle		90° or more
Deposition rate		Aluminum at 5kW　0.5μm/min or more （At 250H directly above Hearth）
Cooling water amount	Hearth	8L/min or more 0.7MPa（maximum pressure）
	Coil	1 L/min or more 0.7 MPa (maximum pressure)
Water temperature		15～25℃
External dimensions		110W×126H×207D
Weight		About 4kg
Applicable power supply		HPS-510S, HPS-1000N, HPS-1600F
Remarks		Cooling water with a specific resistance of 5 kΩ・cm or higher is recommended
Y-axis deflection coil		0～±1.2A ±12VDVmax
(option)		1.8Ω（20℃）

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Features

Suitable for small-scale production due to the 3cc hearth capacity.

Since the electron beam is deflected by the electromagnetic field, the influence of secondary electrons on the deposition target is extremely small.

By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)

The electron beam is deflected 225°, so it is not exposed to the vapor from the vaporized material and the filament has a long life.

Since the emitter assembly can be easily attached and detached, it is easy to replace the consumable parts such as filament and insulator.

Specifications

Acceleration voltage		-4kV～-10kV DC
Beam current		0.5A max (at -10kV)
Maximum input		5kW（-10kV、0.5A）
X-axis deflection coil		0.4～3.5A -18VDCmax 22Ω（20℃）
Filament		0～6V AC 40Amax
Crucible	Volume	2.6cc
	Size	21Φ×15.6Φ×10H
Beam deflection angle		225°
Effective evaporation angle		90° or more
Deposition rate		Aluminum at 5kW　0.5μm/min or more （At 250H directly above Hearth）
Cooling water amount	Hearth	8L/min or more 0.7MPa（maximum pressure）
	Coil	1 L/min or more 0.7 MPa (maximum pressure)
Water temperature		15～25℃
External dimensions		110W×126H×207D
Weight		About 4kg
Applicable power supply		HPS-510S, HPS-1000N, HPS-1600F
Remarks		Cooling water with a specific resistance of 5 kΩ・cm or higher is recommended
Y-axis deflection coil		0～±1.2A ±12VDVmax
(option)		1.8Ω（20℃）