EGL-103S

ULVAC

EGL-103S electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
This evaporation source has a direct-acting three-point switching hearth with a maximum input power of 6kW.
EGL-103S has three crucibles with a capacity of 10cc, which is suitable for experiments in ultrahigh vacuum and small-scale production.

Features

Suitable for small-scale production in ultra-high vacuum due to the adoption of a direct-acting 3-point switching hearth with a capacity of 10cc.
By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)
The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.

Specifications

Acceleration voltage		-4kV～-10kV
Beam current		0.6Amax (at-10kV)
Maximum input		6kW (-10kV, 0.6A)
X-axis deflection coil		0.4～3.5A -18VDCmax 2.8Ω（20℃）
Y-axis deflection coil		0～±1.2A ±12VDCmax 0.9Ω（20℃）
Filament		0～6VAC 50Amax
Crucible	Volume	10cc
	Size	35Φ×31Φ×11H
Beam deflection angle		270°
Effective evaporation angle		90° or more
Cooling water amount	Hearth	10L/min 7kg/cm²G (maximum pressure)
	Hearth deck	2L/min 7kg/cm²G (maximum pressure)
Water temperature		15℃～25℃
External dimensions		313W (MAX)×108H×250D
Weight		About 16kg
Applicable power supply		HPS-1000N, HPS-1600F
Remarks		Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended. Maximum spot site 30×30mm Bake temperature is 120℃ max. However, water must be run on the hearth and hearth deck.

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Features

Suitable for small-scale production in ultra-high vacuum due to the adoption of a direct-acting 3-point switching hearth with a capacity of 10cc.

By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)

The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.

Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.

Specifications

Acceleration voltage		-4kV～-10kV
Beam current		0.6Amax (at-10kV)
Maximum input		6kW (-10kV, 0.6A)
X-axis deflection coil		0.4～3.5A -18VDCmax 2.8Ω（20℃）
Y-axis deflection coil		0～±1.2A ±12VDCmax 0.9Ω（20℃）
Filament		0～6VAC 50Amax
Crucible	Volume	10cc
	Size	35Φ×31Φ×11H
Beam deflection angle		270°
Effective evaporation angle		90° or more
Cooling water amount	Hearth	10L/min 7kg/cm²G (maximum pressure)
	Hearth deck	2L/min 7kg/cm²G (maximum pressure)
Water temperature		15℃～25℃
External dimensions		313W (MAX)×108H×250D
Weight		About 16kg
Applicable power supply		HPS-1000N, HPS-1600F
Remarks		Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended. Maximum spot site 30×30mm Bake temperature is 120℃ max. However, water must be run on the hearth and hearth deck.