EB Source for Metal Film

EGL Series

EGL-103S

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EGL-103S electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
This evaporation source has a direct-acting three-point switching hearth with a maximum input power of 6kW.
EGL-103S has three crucibles with a capacity of 10cc, which is suitable for experiments in ultrahigh vacuum and small-scale production.

Features

  • Suitable for small-scale production in ultra-high vacuum due to the adoption of a direct-acting 3-point switching hearth with a capacity of 10cc.
  • By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.(Japan patents 831485, 843447)
  • The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
  • Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.

Specifications

Acceleration voltage -4kV~-10kV
Beam current 0.6Amax (at-10kV)
Maximum input 6kW (-10kV, 0.6A)
X-axis deflection coil 0.4~3.5A -18VDCmax
2.8Ω(20℃)
Y-axis deflection coil 0~±1.2A ±12VDCmax
0.9Ω(20℃)
Filament 0~6VAC 50Amax
Crucible Volume 10cc
Size 35Φ×31Φ×11H
Beam deflection angle 270°
Effective evaporation angle 90° or more
Cooling water amount Hearth 10L/min 7kg/cm2G (maximum pressure)
Hearth deck 2L/min 7kg/cm2G (maximum pressure)
Water temperature 15℃~25℃
External dimensions 313W (MAX)×108H×250D
Weight About 16kg
Applicable power supply HPS-1000N, HPS-1600F
Remarks Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended.
Maximum spot site 30×30mm
Bake temperature is 120℃ max. However, water must be run on the hearth and hearth deck.

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