EB Source for Metal Film
This evaporation source has a direct-acting three-point switching hearth with a maximum input power of 6kW.
EGL-103S has three crucibles with a capacity of 10cc, which is suitable for experiments in ultrahigh vacuum and small-scale production.
- Suitable for small-scale production in ultra-high vacuum due to the adoption of a direct-acting 3-point switching hearth with a capacity of 10cc.
- By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)
- The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
- Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.
|Beam current||0.6Amax (at-10kV)|
|Maximum input||6kW (-10kV, 0.6A)|
|X-axis deflection coil||0.4～3.5A -18VDCmax
|Y-axis deflection coil||0～±1.2A ±12VDCmax
|Beam deflection angle||270°|
|Effective evaporation angle||90° or more|
|Cooling water amount||Hearth||10L/min 7kg/cm2G (maximum pressure)|
|Hearth deck||2L/min 7kg/cm2G (maximum pressure)|
|External dimensions||313W (MAX)×108H×250D|
|Applicable power supply||HPS-1000N, HPS-1600F|
|Remarks||Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended.
Maximum spot site 30×30mm
Bake temperature is 120℃ max. However, water must be run on the hearth and hearth deck.
"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.
Inquiry about this product