EB Source for Metal Film

EGL Series



EGL-110 electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
This evaporation source has a hearth with a maximum input power of 16kW.
The crucible has a large capacity of 110 cc, which enables the high-speed deposition of thick films.


  • Large-capacity vapor deposition is possible by adopting a large capacity 110cc hearth.
  • The electron beam is deflected by the electromagnetic field, the effect of secondary electrons on the deposition target is extremely small.
  • By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly. (Japan patent 831485, 843447)
  • The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
  • Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.


Acceleration voltage -4kV~-10kV
Beam current 1.6Amax (at-10kV)
Maximum input 16kW (-10kV, 1.6A)
X-axis deflection coil 0.4~3.5A -18VDCmax
Y-axis deflection coil 0~±1.2A ±12VDCmax
0.9Ω(20℃)2 pcs
Filament 0~6VAC 40Amax
Crucible Volume 110cc
Size 75Φ×59Φ×32H
Beam deflection angle 270°
Effective evaporation angle 120° or more
Deposition rate Al at 16kW 4.5μm/min or more (At 250H directly above Hearth)
Cooling water amount 19L/min or more, 0.7MPa(maximum pressure)
Water temperature 15℃~25℃
External dimensions 136W×90H×220D
Weight About 15kg
Applicable power supply HPS-1000N, HPS-1600F
Remarks 1. Able to attached wire feeder.
2. Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended.


"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept