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EB Source for Metal Film
EGL Series
EGL-35
アルバック
Electron beam evaporation source EGL-35 is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
This evaporation source has a hearth with a maximum input power of 10 kW.
The crucible has a large capacity of 40 cc per piece, which enables the high-speed deposition of thick films.
This evaporation source has a hearth with a maximum input power of 10 kW.
The crucible has a large capacity of 40 cc per piece, which enables the high-speed deposition of thick films.
Features
- Large-capacity vapor deposition is possible by using a large-capacity 40cc hearth.
- The electron beam is deflected by the electromagnetic field, the effect of secondary electrons on the deposition target is extremely small.
- By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.（Japan patents 831485, 843447)
- The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
- Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.
Specifications
| Acceleration voltage | -4kV～-10kV DC | |
| Beam current | MAX 1.0A (At accelerating voltage-10kV) | |
| Maximum input power | 10kW（-10kV, 1.0A） | |
| X-axis deflection coil | 0.4～3.5A MAX-18V DC 2.8Ω (At room temperature 20°C) |
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| Y-axis deflection coil | 0～±2A MAX±12VDCmax 6Ω×2 (At room temperature 20°C) |
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| Filament | 0～6V AC MAX40A | |
| Crucible | Volume | 40cc |
| Size | 50Φ×41Φ×25H | |
| Beam deflection angle | 270° | |
| Effective evaporation angle | 120° or more | |
| Deposition rate | 1.8μm/min or more（A110kW, 250H directly above the hearth） | |
| Cooling water volume | 10L/min or more（Maximum output 0.7MPa） | |
| Water temperature | 15～25℃ | |
| External dimensions | 110H×79W×206D | |
| Weight | 10kg | |
| Applicable power supply | HP-1000N, HPS-1600F | |
| Remarks | 1. Wire feeder mountable 2. Cooling water with a specific resistance of 5 kΩ?cm or higher is recommended |
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