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EB Source for Metal Film
EGL Series
EGL-80M
ULVAC
EGL-80M electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
This evaporation source has a four-point switching hearth with a maximum input power of 16kW.
The crucible has a large capacity of 110 cc per piece , which enables the high-speed deposition of thick films.
This evaporation source has a four-point switching hearth with a maximum input power of 16kW.
The crucible has a large capacity of 110 cc per piece , which enables the high-speed deposition of thick films.
Features
- Large-capacity multi-layer deposition is possible by adopting a large capacity 110cc 4-point switching hearth.
- The electron beam is deflected by the electromagnetic field, the effect of secondary electrons on the deposition target is extremely small.
- By scanning the beam spot on the X-axis and Y-axis even with a purifying substance, it is possible to eliminate the pitting phenomenon and evaporate smoothly. (Japan patern 831485, 843447)
- The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
- Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.
- Adopting a water-cooled magnet coil allows continuous operation in high temperature atmosphere.
- The hearth position detection mechanism is installed as an option and hearth rotation can be automated.
Specifications
| Acceleration voltage | -4kV～-10kV DC | |
| Emission current（MAX）） | 1.6A(At accelerating voltage-10kV) | |
| Maximum input power | 16kW（-10kV、1.0A） | |
| X-axis deflection coil | 2.5～16A MAX-12V DC 0.54Ω (At room temperature 20°C) |
|
| Y-axis deflection coil | 0～±2A MAX±12V DC 1.2Ω×2(At room temperature 20°C) |
|
| Filament | 0～6V AC MAX 50A | |
| Filament | Volume（Quantity） | 110cc (4 pieces) |
| Size | 75Φ×57Φ×32H | |
| Beam deflection angle | 270° | |
| Effective evaporation angle | 100° or more | |
| Deposition rate | 4μm/min or more （A| 16kW, 250H above the hearth） |
|
| Cooling water volume | Hearth：20L/min or more （MAX 7kg/cm2） Coil：4L/min or more （MAX 7kg/cm2） |
|
| Water temperature | 15～25℃ | |
| Hearth position posting mechanism (option) | Contact quantity：NO contact 4sets Volume：50mA～1A MAX 50V AC |
|
| External dimension | 318L×265W×168H | |
| Weight | 30kg | |
| Applicable power supply | HPS-1600F（Hi-power spec） | |
