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EB Source for Optical Film
EGO Series
EGO-40M
ULVAC
EGO is a highly reliable EB gun that is designed based on technologies ULVAC has gained over many years.
Features
- EGO models have high-speed sweep and vertical incidence, ideal for use with oxide and compound evaporation.
Applications
- Evaporation source for electron beam evaporation
Specifications
| Model | EGO-1G | EGO-40M | EGO-206M | EGO-406M | |
| Beam deflection angle | 270° | ||||
| Number of crucibles | 0 | 4 | 6 | 6 | |
| Crucible capacity | - | 10cc ×2 / 40cc ×2 | 20cc | 40cc | |
| Cooling water volume | Crucible | - | 10L/min | 10L/min | 10L/min |
| Coil | 2L/min | - | - | - | |
| External dimensions W×D×H | 168×285×174mm | 170×309×174mm | 200×339×176mm | 200×339×176mm | |
| Weight | 10kg | 18kg | 18kg | 18kg | |
| Applicable power supply | HPS-1000N-G100/G200 | ||||
