Infrared Gold Image Furnace / RTA System
Variable Atmosphere Lamp Heating System
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Variable Atmosphere Lamp Heating System
RTP-6
This infrared lamp heating system with parabolic type reflectors can heat uniformly a wafer of the size up to 6 inches. It is capable of high-speed heat treatment, the most available for the research and development of heat treatment process. Silicide formation in individual semiconductor process and process annealing of compound semiconductor are available.
Variable Atmosphere Lamp Heating System
QHC series / VHC series
Helping process development From solar cells to compound semiconductors.
Combining an Infrared Gold Image Furnace and temperature controller, the QHC/VHC series is a compact high speed heating/ cooling system equipped with a quartz heat treatment chamber.
The system is customizable to your needs.