Print/Download
Ion Pump
PST Series
PSTｰ400CXII/AXII
アルバック
Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high and extremely high vacuums on the order of 10-10 Pa. They are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps) - High pumping speed attained the ultra-high vacuum
- Pumping down to ultra-high vacuum in a short period of time
- Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
| Pumping speed to (operating pumping speed)1×10-7Pa |
|
||||
| Ultimate pressure | 10-10Pa order | ||||
| Operating pressure | <3.0×10-3Pa(recommended value) (Maximum operation pressure 1×10-3Pa) *Using GST-07L controller |
||||
| Inner volume | 0.014m3 approx. | ||||
| Number of pump elements | CX2 cells (x 4), AX2 cells (x 4) | ||||
| Connection flange model | UFC203 | ||||
| Applied voltage | DC+7.5kV | ||||
| Standard bake-out temperature | 250°C | ||||
| Weight | 124kg (with heater, cover) | ||||
| External dimensions W×D×H | 296×544×376 mm | ||||
| Power required by heater unit | Single-phase 200 V, 800 W approx. |
