Fundamentals of Vacuum Pumps (High Vacuum)

What is an Ion Pump?

Ion pump works for generating ultra-high or extreme-high vacuum. The structure is simple; an electric field is applied to a cell consisting of an anode and a cathod, so there are neither driving parts nor sounds and vibration. This pump is categorized in accumulating type and exhausts independently without a fore pump.

pump_large (9).jpg

Ion Pump's Applications:

  • Accelerators
  • Ultra-High or Extreme-High Vacuum Pumping Units
  • Analytical Instruments
  • Electron Beam Irradiators


This pump doesn't make any noize and vibration in operation due to no mechanical movable parts. This feature is essential for analytical instruments or accelerators.

Advantage Disadvantage
Peaks ultra-high and extreme-high vacuum.
No mechanical noise and vibration.
Completely oil-free.
Difficult to exhaust gas at a high flow rate.
Operating range from high vacuum.

How Ion Pump Works


A pump case, a magnet yoke, a cell (pump cell) consisting of an anode and a cathode, and a simple structure apply an electric field to the cell.


1) Generation of primary electrons●.
2) Spiral orbit of the primary electrons.
3) Generation of secondary electrons and ions ● by the collision of primary electrons and gas molecules●
4) Ions collide with the cathode and eject titanium atoms●.
5) Titanium atoms adsorb active gas molecules, and ions are trapped in the cathode.


This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept