Fundamentals of Vacuum Pumps (High Vacuum)

What is a Mechanical Booster Pump?

A mechanical booster pump dramatically increases pumping speed.
A roughing pump such as an oil rotary vacuum pump and a dry pump etc. combined with the mechanical booster pump, increases its pumping speed at the pressure range decreased.

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Mechanical Booster Pump Applications:

  • Semiconductor Processes
  • Vacuum Distillation
  • Vacuum Packaging
  • Degassing
  • Thin Films
  • Vacuum Metallurgy
  • Low-Density Wind Tunnel Experiments
  • Space Development
  • Vacuum impregnation
  • Vacuum Drying

Feature

Advantage Disadvantage
Pumping speed skyrockets from 10KPa to 0.1KPa Backflow

How Mechanical Booster Pump Works

Two cocoon-shaped rotors set each side's driving gear in a casing rotate synchronously in opposite directions. Gas from an inlet port is sealed between the casing and the rotor. The rotor pumped the gas to the exhaust port, and an auxiliary pump at the rear stage discharges the gas into the atmosphere.
Rotors don't contact each other and the casing. They rotate to transfer the gas while keeping a slite gap of only 0.1mm~0.3mm, so lubricating oil is not required in the rotor chamber.

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HOW TO

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