Fundamentals of Vacuum Pumps (High Vacuum)

What is a dry scroll vacuum pump?


A dry scroll vacuum pump pumps by a combination of the motion of a spiral stator and rotor.
The figure illustrates the structure of a scroll-type vacuum pump.


The pair of spirals makes line contact with the wall with their center slightly off. One scroll makes an oscillation spiral motion to the other scroll relatively. The gas trapped in the crescent-shaped space is compressed toward the center and exhausted through a hole in the center.

Some dry scroll pumps reach an ultimate pressure of 1 Pa. The dry scroll pumps are used in various applications such as vacuum drying equipment, physics and chemistry analysis equipment, vacuum suction transfer equipment, and vacuum heat treatment furnaces.


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