Fundamentals of Vacuum Pumps (High Vacuum)
Dry Scroll Vacuum Pump
What is a dry scroll vacuum pump?
A dry scroll vacuum pump pumps by a combination of the motion of a spiral stator and rotor.
The figure illustrates the structure of a scroll-type vacuum pump.
The pair of spirals makes line contact with the wall with their center slightly off. One scroll makes an oscillation spiral motion to the other scroll relatively. The gas trapped in the crescent-shaped space is compressed toward the center and exhausted through a hole in the center.
Some dry scroll pumps reach an ultimate pressure of 1 Pa. The dry scroll pumps are used in various applications such as vacuum drying equipment, physics and chemistry analysis equipment, vacuum suction transfer equipment, and vacuum heat treatment furnaces.
Fundamentals of Vacuum Pumps (High Vacuum)
- Screw Pump
- Multi-Stage Roots Vacuum Pump
- Dry Scroll Vacuum Pump
- Dry Diaphragm Vacuum Pump
- Dry Rocking Piston Vacuum Pump
- Dry Rotary Vane Vacuum Pump
- Oil Rotary Vacuum Pump
- Mechanical Booster Pump
- Cryopumps
- Turbomolecular Pump
- Ion Pump
- Titanium Sublimation Pump
- Sorption Pump
- Diffusion Pump
- Ejector Pump
HOW TO
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- The Others
- How to Choose The Best Products
- Old Models vs. New Models
- Troubleshooting