Fundamentals of Vacuum Pumps (High Vacuum)
Titanium Sublimation Pump
What is a Titanium Sublimation Pump?
A titanium sublimation pump is also called a titanium getter pump or a titanium getter. This vacuum pump exhausts with titanium to create an ultra-high vacuum. Unlike a sorption pump, which obtains a vacuum by cooling, this pump forms a large amount of activated surface on a wall by heating and sublimating titanium. This pump works in combination with sputter ion pumps or turbomolecular pumps.
Titanium Sublimation Pump's Application:
- Accelerators
- Analytical instrument
Features
The titanium sublimation pump generates an ultra-high vacuum, exhausting with the getter action of titanium. The getter action process is absorbing gas molecules and exhausting gas. The getter material, active titanium, chemically absorbs hydrogen, oxygen, nitrogen, carbon monoxide, and active gas and makes vacuum quality higher.
Advantage | Disadvantage |
Oil-Free, Excellent maintainability, Peak ultra-high vacuum with ion pumps. | Inert gasses unavailable |
How Titanium Sublimation Pump Works
A filament for titanium evaporation inside the pump is heated and sublimated into vacuum. The titanium gas forms a deposition film on the inside wall. The pump absorbs and exhausts gas with the getter action of titanium. When the surface is filled with absorbed gas molecules, the titanium deposition film forms onto the filled surface, and a new surface comes up.
Fundamentals of Vacuum Pumps (High Vacuum)
- Screw Pump
- Multi-Stage Roots Vacuum Pump
- Dry Scroll Vacuum Pump
- Dry Diaphragm Vacuum Pump
- Dry Rocking Piston Vacuum Pump
- Dry Rotary Vane Vacuum Pump
- Oil Rotary Vacuum Pump
- Mechanical Booster Pump
- Cryopumps
- Turbomolecular Pump
- Ion Pump
- Titanium Sublimation Pump
- Sorption Pump
- Diffusion Pump
- Ejector Pump
HOW TO
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- The Others
- How to Choose The Best Products
- Old Models vs. New Models
- Troubleshooting