Fundamentals of Vacuum Pumps (High Vacuum)

What is a Turbomolecular Pump?

A turbomolecular pump consists of a rotor as a rotor blade with turbine-shaped blades and a stator as a flexed blade. The performance has developed recently, getting attraction.

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Turbomolecular Pump's Applications:

  • Semiconductor manufacturing equipment
  • Deposition equipment
  • Sputtering equipment
  • Analysis equipment
  • Etching equipment accelerator
  • Flat Panel Display manufacturing equipment

Feature

The turbomolecular pump consists of rotating blades at high speed and fixed blades. The rotating blades rotate tens of thousands of times/sec. The load (resistance) in the air damages them.
Therefore, the turbomolecular pump must work in a vacuum atmosphere, so fore vacuum pumps such as dry pumps pr rotary pumps are necessary.

Advantage Disadvantage
Constant pumping speed and gas pumping in the molecular flow region.
No maintenance; Regeneration work.
Allow Flammable and corrosive gas exhausted.
Blades rotating at high speed.

How Turbomolecular Pump Works?

When gas molecules inflow the pump's inlet port, the rotating blades at high speed give the gas molecules momentum and push them to the lower stage. The gas molecules are compressed through multiple compression stages and flow to the exhaust port.

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HOW TO

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