Fundamentals of Vacuum Pumps (High Vacuum)

What is a Sorption Pump?

Sorption pumps work with gas condensation at low temperatures like cryopumps. Sorption, as this name means adsorption.

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Sorption Pump's Applications:

  • Accelerators
  • Electron Microscopes
  • Analytical Instruments


This pump absorbs gas molecules and exhausts them by cooling a porous absorbent with a large specific surface with liquid nitrogen. Absorbents are activated carbon and molecular sieves which surfaces are about 500 m3/1gram. This can perform rough pumping from the atmospheric pressure and generates clean vacuum.

Advantage Disadvantage
Exhausting from the atmospheric pressure and reach an oil-free vacuum. After pumping a certain amount of inert gas such as hydrogen, helium, and neon, Regeneration is required.

How Sorption Pump Works

The gas drawn through the inlet part inflow into a chamber with a porous adsorbent, Molecular Sieves. The molecular sieves cooled by the liquid nitrogen outside the chamber adorbs the gas in the chamber. Finally, the inside of the pump is evacuated.



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