Fundamentals of Vacuum Pumps (High Vacuum)

What is Dry rotary vane vacuum pump?

A dry rotary vane vacuum pump is a mechanical vacuum pump consisting of a rotor, cylinder, vane, etc., as shown in the figure. Oilless pumps inevitably cause air to flow back through the gap between the cylinder and rotor. As shown in the figure, the multi-vane structure prevents reverse flow even a little. This type of pump is a mechanical vacuum pump consisting of a rotor, cylinder, vane, etc., as shown in the figure. Oilless pumps inevitably cause air to flow back through the gap between the cylinder and rotor. As shown in the figure, the multi-vane structure prevents reverse flow even a little.

This pump has a simple structure, and the pressure reached is not good. However, it can achieve a high pumping speed in the low vacuum region and is widely used as a vacuum source for suction and transfer machines.

In this vacuum pump, the vanes always move while sliding with the rotor and the cylinder, which increases heat generation due to sliding and requires careful cooling. The vanes are made of a carbon-based material, and as the vanes slide, the carbon will inevitably wear out and become powdery. Although the amount of carbon powder generated is tiny, it adheres to the sliding surface in a thin film form and acts as an antifriction agent.
In addition, this carbon powder may cause problems due to the high humidity of the exhaust gas, or due to moisture, it may become a highly viscous lump, which may clog the gap between the rotating parts. Therefore, this pump is not suitable for exhausting moisture and corrosive gas. This rotary bladed dry vacuum pump is used as a vacuum source (adsorption and suction) in the electronics, food, packaging, printing, dentistry, industrial machinery, and semiconductor industries.

Dry Rotary Vane Vacuum Pump's Structure

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HOW TO

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