Turbo Molecular Pump
- Preparing various models according to the application
The back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
- Adopting a superior power failure countermeasure function
A solenoid valve is equipped as standard on the fore valve to prevent reverse flow and failure at power failure.
- Possible to check the pressure during rough vacuum pumping due to the Pirani vacuum gauge is equipped as a standard parts.
- Vacuum pumping to the Ultra High Vacuum area is possible
Designed for easy integration of up to 2 vacuum gauges
(※ As product specification value)
- Evacuation system from atmospheric pressure to high vacuum
- Evacuation system of various experiment and R&D equipments
- Vacuum substitution of high purity gas
- Roughing evacuation system of UHV system
- Evacuation system of analytical equipment
|Input power source||Single phase AC 100～240V(50/60Hz)|
|Standard accessories||nstruction manual(CD-R),I/F connector,Protective net,Gasket|
|External option||AC cable(3m)*4|
*1 A digit number is expressed.
*2 Without a protective net.
*3 At ultimate pressure. Measured by ULVAC standard for ICF flange type.
*4 Plug is selectable.
"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.
Inquiry about this product