Turbo Molecular Pump
UTMーB Series
UTM70B
アルバック
The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
Features
- No limitation in the mounting direction The degree of freedom in system design is high because of free mounting direction.
- On-board controller Integrated controller to the pump body is capable to reduce wire work and downsize pumping system.
- High compression ratio and high back pressure High compression ratio made it possible to run the pump at high back pressure and downsize its backing pump.
- Three kinds of flange Inlet port flange is selectable from ISO100-K, ICF152, and VG100.
- Clean vacuum environment Less back flow of hydrocarbon gases while both the pump is running and stopping.
- Low noise Noise level at the no load is 50dB or less(with ISO-100K flange)
- Applicable standard CE and NRTL
Applications
- Main pumping system for analytical equipments, R&D systems, experimental devices, etc.
- Main pumping system for evaporators and sputtering systems, etc.
- Main pumping system to evacuate low molecule gases such as H2, He
Specifications
Model
|
UTM70B | ||||
Pump | |||||
Cooling method | Natural air cooling | Forced air cooling(fan) | |||
Inlet Flange *1 | VG65, ICF114, ISO063-K | ||||
Outlet Flange | KF16 | ||||
Pumping speed(without a protective net ) |
N2
|
70 L/s | |||
He
|
60 L/s | ||||
H2
|
49 L/s | ||||
Ultimate pressure(With 2stage back pump)*2,*3 |
After baking
|
- | 10-8Pa/10-10Torr(mbar) | ||
Before baking
|
10-6Pa/10-8Torr(mbar) | ||||
Max. compression rate | N2 : >1×109, He : 4×107, H2 : 4×105 | ||||
Max. pressure at inlet *4, *5, *6 |
N2
|
0.43Pa/3×10-3Torr/43mbar | 1.1Pa/8×10-3Torr/110mbar | ||
Max. pressure at outlet *4, *5, *7 |
N2
|
300Pa/2.3torr/3×104mbar | 900Pa/6.8Torr/9×104mbar | ||
Continuous running maximum flow *8 When 60L.min backing pump is used |
Without gas purge
|
N2
|
15sccm | 40sccm | |
Without gas purge
|
Ar
|
- | 10sccm | ||
With gas purge
|
- | 15sccm | |||
Recommend backing pump(when evacuating 10SCCM)*9 | >60L/min | ||||
Weight*10 | VG:3.3kg, ISF:3.0kg, ISO:5.0kg | ||||
Rotation speed | 87000rpm | ||||
Start-up time(Up to 80%)(DC24V. Back pressure:5Pa or less) | 1.7分 | ||||
Surface treatment *11 | None | ||||
Mounting direction | All direction | ||||
Noise *12 | <48dB(A) | ||||
Controller | |||||
Input power source | DC24V ±5%, 120W | ||||
Contact input and output signal | REMOTE(D-sub 15 pin male) Digital input:4 points.Output:4 points.Analog output:1 point. |
||||
Serial communication | RS-485(D-sub 15 pin male, Shared with REMOTE) | ||||
LED Display | POWER,NORMAL,ALARM | ||||
Switch | START/STOP,RESET | ||||
Variable rotational frequency/ speed | Change of operation rotation speed number is possible between 25% and 100% from the pump spec by 0.1% step. |
||||
Abnormal operation detection | Detecting alarm and warning. | ||||
Protection circuit | Indicating alarm and warning. | ||||
Standard accessories |
Instruction Manual(CD-R), Protective net(Only VG and ICF. |
*1 | Inlet flenge is from VG65,ICF114 and ISO63-K when ordering. |
*2 | A digit number is expressed. |
*3 | Baking is available only for forced air cooling type with ICF flange. |
*4 | Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change. |
*5 | Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time. |
*6 | Maximum inlet port pressure which can accept continuous running. |
*7 | Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm. |
*8 | Value when ambient temperature is 5~25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm. |
*9 | Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases. |
*10 | Cooling Fan makes UTM70B 0.2kg heavier. |
*11 | Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases. |
*12 | This value is measured by ULVAC standard for ISO flange type. |