Turbo Molecular Pump

UTMーB Series

UTM70B

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The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.

Features

  • No limitation in the mounting direction The degree of freedom in system design is high because of free mounting direction.
  • On-board controller Integrated controller to the pump body is capable to reduce wire work and downsize pumping system.
  • High compression ratio and high back pressure High compression ratio made it possible to run the pump at high back pressure and downsize its backing pump.
  • Three kinds of flange Inlet port flange is selectable from ISO100-K, ICF152, and VG100.
  • Clean vacuum environment Less back flow of hydrocarbon gases while both the pump is running and stopping.
  • Low noise Noise level at the no load is 50dB or less(with ISO-100K flange)
  • Applicable standard CE and NRTL

Applications

  • Main pumping system for analytical equipments, R&D systems, experimental devices, etc.
  • Main pumping system for evaporators and sputtering systems, etc.
  • Main pumping system to evacuate low molecule gases such as H2, He

Specifications

Model
UTM70B
Pump
Cooling method Natural air cooling Forced air cooling(fan)
Inlet Flange *1 VG65, ICF114, ISO063-K
Outlet Flange KF16
Pumping speed(without a protective net )
N2
70 L/s
He
60 L/s
H2
49 L/s
Ultimate pressure(With 2stage back pump)*2,*3
After baking
- 10-8Pa/10-10Torr(mbar)
Before baking
10-6Pa/10-8Torr(mbar)
Max. compression rate N2 : >1×109, He : 4×107, H2 : 4×105
Max. pressure at inlet *4, *5, *6
N2
0.43Pa/3×10-3Torr/43mbar 1.1Pa/8×10-3Torr/110mbar
Max. pressure at outlet *4, *5, *7
N2
300Pa/2.3torr/3×104mbar 900Pa/6.8Torr/9×104mbar
Continuous running maximum flow *8
When 60L.min backing pump is used
Without gas purge
N2
15sccm 40sccm
Without gas purge
Ar
- 10sccm
With gas purge
- 15sccm
Recommend backing pump(when evacuating 10SCCM)*9 >60L/min
Weight*10 VG:3.3kg, ISF:3.0kg, ISO:5.0kg
Rotation speed 87000rpm
Start-up time(Up to 80%)(DC24V. Back pressure:5Pa or less) 1.7分
Surface treatment *11 None
Mounting direction All direction
Noise *12 <48dB(A)
Controller
Input power source DC24V ±5%, 120W
Contact input and output signal REMOTE(D-sub 15 pin male)
Digital input:4 points.Output:4 points.Analog output:1 point.
Serial communication RS-485(D-sub 15 pin male, Shared with REMOTE)
LED Display POWER,NORMAL,ALARM
Switch START/STOP,RESET
Variable rotational frequency/ speed Change of operation rotation speed number is possible between 25%
and 100% from the pump spec by 0.1% step.
Abnormal operation detection Detecting alarm and warning.
Protection circuit Indicating alarm and warning.
Standard accessories

Instruction Manual(CD-R), Protective net(Only VG and ICF.
In ISO flange protective net is built in the gasket.),Gasket(inlet flange),
Dust cap(for inlet, outlet and connector)

*1 Inlet flenge is from VG65,ICF114 and ISO63-K when ordering.
*2 A digit number is expressed.
*3 Baking is available only for forced air cooling type with ICF flange.
*4 Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change.
*5 Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time.
*6 Maximum inlet port pressure which can accept continuous running.
*7 Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm.
*8 Value when ambient temperature is 5~25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm.
*9 Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases.
*10 Cooling Fan makes UTM70B 0.2kg heavier.
*11 Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases.
*12 This value is measured by ULVAC standard for ISO flange type.

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