UTM1200A|UTM-MI Series|Turbo Molecular Pump|High Vacuum Pump|Products|ULVAC SHOWCASE

Turbo Molecular Pump

UTM-MI Series

UTM1200A

アルバック

Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

Features

  • Controller integrated with the pump body
    No wiring work between pump body and controller.
  • Free mounting direction
    Free mounting direction makes the system design flexible.
  • 5 models from 1000L/s to 4000L/s class.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100%
    Enabling the pressure adjustment in a chamber.
  • High durability and safety
    Safety confirmation tests are passed, such as air
    rushing-in test and touch down test.

Applications

    • Main vacuum pumping system for equipment
      ・Semiconductor equipment
      ・Evaporator,Sputtering system
      ・Analytical equipment,Experimental device and etc.
    • Main vacuum pumping system for the light processes that do not generate side reaction products.
    • Replacement from oil diffusion pumps
    • General use for high vacuum evacuation system.

Specifications


Model UTM1200A UTM1600A UTM2300A UTM3400A
Inlet port VG150
ISO160F
VG200/VG250
ISO200F/ISO250F
VG250
ISO250F
VG300/VG350
ISO320F
Outlet port KF40
Ultimate pressure(*1) Pa 10-7
Pumping speed (*2)(*3) N2 L/s 1030 1400 2100 3200
Ar L/s 980 1330 2000 3100
H2 L/s 660 750 1380 2100
Compression rate N2 2×108 ≧ 1×108 ≧ 1×109
He 7×103 5×103 1×105
H2 8×102 9×102 6×103
Max inlet pressure(*4) Pa 26 4.5 7
Max outlet pressure(*4) Pa 266 200 270
Rotation speed min-1 37200 33700 27600
Speed variation Speed is variable between 25% and 100% of the rated speed.( set as 0.1%)
Start-up time ≦ 8minutes ≦ 9minutes ≦ 16minutes
Mounting position In any desired direction
Surface treatment(*5) None
Commun ication Contact D-sub 25 pin female Contact input and output signal D-sub 37 pin female Contact input and output signal
Serial Serial connecter RS232C/RS485 D-sub 9 pin male RS232C/RS485
Controller Composition Pump with integrated controller
Input electric power Single phase AC200 ?240V ±10%( 50/60Hz ±2Hz)
Max power 0.75kVA 1.2kVA
Cooling method Water cooled
Cooling water(*6) Flow rate L/min 3~4
Pressure MPaG 0.2 ~ 0.4
Noise dB(A) 57 60
Weight kg 43 41 56 94
Recommended backing pump(*7) ≧ 600L/min ≧ 1500L/min
Applicable standard CE、TUVus
Standard accessories O-ring(Only VG)、Dust cap(Outlet port)、Remote-control Connector、Instruction manual(CD-ROM) 
Select parts AC Cable AC Conector / AC Cable(5m/10m/15m/20m)
Special bolt for fixing pump M10(Non-RoHS / RoHS)/ M12(Non-RoHS / RoHS)
Special bolt for fixing pump Need(M10)(*8) Not Need(*8)
Option Gas purge adaptor (KF10)

*1:digit number is expressed.
*2:Without a protective net.
*3:Calculated values:UTM2300A and UTM3400A 
*4:Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5:Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6:Not condensing 
*7:When evacuating 30SCCM 
*8:Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact us for the detailed information.

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept