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Calibrated Leak

Membrane Type Calibrated Leak

CLM

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Calibrated leak that utilizes the penetration of helium gas through glass (membrane). (Vacuum calibration)

Specifications

Model Specification Gas Pressure Joint
CLM-07AY 10-7Pa・m3/s level 261kPa(abs) Φ18mm pipe(with manual valve)
CLM-08A 10-8Pa・m3/s level 251kPa(abs)
CLM-09AZ 10-9Pa・m3/s level 261kPa(abs)
CLM-10A 10-10Pa・m3/s level 101kPa(abs)

Internal calibrated leak for HELIOTseries

Model Specification Gas Pressure Applicable models
CLM-08E 10ー8Pa・m3/s level 251kPa(abs) HELIOT710,700,300series
CLM-08F 10-8Pa・m3/s level 251kPa(abs) HELIOT900series

Dimension drawing

CLM-08A, CLM-09AZ, CLM-10A
CLM-08ACLM-09AZCLM-10A.png

CLM-07AY

CLM-07AY.png

CLM-08F

CLM-08F.png

CLM-08E

CLM-08E.png

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