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RF Power Supply / Matching box
RMG Series
RMG-1303
ULVAC
RMG-1303 is a 13.56MHz, 300W output matching unit integrated RF power supply for use in plasma processes such as RF sputtering and plasma CVD etching. The matching unit and RF power supply are integrated to achieve compactness and weight reduction. It can be controlled at low output and can be used in a wide range of fields from research and development applications to mass production equipment.
Features
- Low output power control is possible
Controllable from low output of 1W. - Equipped with pulse RF output function as standard
Equipped with a pulse RF output function of 500Hz to 100KHz as standard. - Equipped with an external synchronization terminal as standard
Equipped with 13.56MHz sync signal input / output terminals as standard for use during superimposed operation. (BNC terminal) - Wide range input from AC100V to AC220V
A wide range of single-phase 100V to 220V / 50Hz to 60Hz input is possible. - Small and lightweight
200mm x 200mm x 350mm / 10Kg, compact and lightweight power supply. - Compatible with various standards
RoHS, CE, KC, SEMI-F47 compliant
Applications
- Sputtering equipment
- CVD equipment
- Plasma cleaning equipment
- Plasma etching equipment
- Plasma ashing equipment
- RF ion source
- RF Neutralizer
Specifications
RF power supply part
| Rated input voltage | AC100V to 220V(Single-phase 50 to 60Hz) |
| Input capacity | 700VA |
| Leakage current | 5mA or less |
| Input connector | IEC60320-C14 |
| Oscillation frequency | 13.56MHz±0.01% *1 |
| Rated traveling power | 300W (50 Ω load) |
| Maximum reflected power | 80W |
| Power stability | Within ± 1% of the set value or ± 2W(50ohm) |
| Cooling method | Forced air cooling by a fan |
*1 Pulse RF output from 500Hz to 100KHz is possible.
Matching circuit part
| Rated traveling power | 300W |
| Allowable output current | 10Arms |
| Allowable output current | 2500Vpp/±2500Vdc(With standard) *2 |
| RF output electrode | 2-M4(With standard)･N･HN･DIN7/16 *3 |
| Matching accuracy | VSWR1.2 or 3W or less |
*2 The rated voltage can be changed as an option.
*3 It is possible to change to the connector output type as an option.
Dimension drawing
