Introduction of vacuum equipments manufactured by ULVAC Group.
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A vacuum transfer robot is a device designed to efficiently and accurately perform transport tasks in a vacuum environment. It is a crucial element that supports the quality and efficiency of vacuum processes and is widely used in various fields such as semiconductor manufacturing equipment, coating systems, and analytical instruments.
In particular, vacuum transfer robots for semiconductor manufacturing equipment require different specifications from atmospheric transfer robots. They must be fine-tuned to achieve high airtightness and minimize friction. The following performance requirements are especially important:
・High Reliability: Maintains stable operation even during long periods of use.
・Dust Prevention: Designed to prevent particles from adhering to the wafer surface.
・High Speed: Enables fast operation to improve throughput.
Vacuum transfer robots equipped with these features contribute to process efficiency and the production of high-quality products.
Vacuum transfer robots play the following roles:
・Wafer and Substrate Transfer
They eliminate the need for manual operations, enabling efficient processes while maintaining the vacuum environment.
・High-Precision Positioning
They accurately position wafers or substrates at their destinations, ensuring process precision in subsequent steps.
・Contamination Prevention
In vacuum environments, particle contamination is a significant issue. Vacuum transfer robots minimize this risk through non-contact transfer and clean design.
・Process Automation and Efficiency
They enable automated transfer that supports continuous process flow, reducing processing time and labor costs.
・Adaptation to High-Temperature and Special Environments
Vacuum environments often experience temperature and pressure fluctuations. These robots are designed to maintain high reliability even under such conditions.
・Productivity Improvement
By utilizing vacuum transfer robots, overall process throughput is improved, allowing flexible support for both small-batch, high-mix production and large-scale manufacturing.
Type
Vacuum transfer robot
ULVAC’s vacuum transfer robots, developed based on extensive expertise as a vacuum equipment manufacturer, offer clean and highly reliable performance in vacuum handling applications.
COVOT
Model: COVOT
It is a clean and versatile vacuum transfer robot that incorporates ULVAC's technology cultivated as a vacuum equipment manufacturer.
ELEC-RZ
Model: ELEC-RZ
ELEC-RZ is a high-vacuum-compatible transfer robot that is compact and low-cost based on the excellent functions and performance of the "Model:COVOT".