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Multi-Stage Roots Type Dry Vacuum Pump
HR/UR Series
HR
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Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.
Features
- Uniform high temparature distribution pump
The HR series pump is designed to keep uniform high temparature for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
The UR series pump is enable to keep higher temparature than HR series. - Excellent helium pumping capability
Canned motor for safety and ease of maintenance - Power failure protection
Pump withstands power interruptions of up to 1000ms duration. - Superior resistance for corrosive gas：
Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses. - Communication function：
Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
Applications
- CVD equipment
- Etching equipment
- Ashing equipment
- ALD、ALH etc
Specifications
| Model | HR60 | HR90 | HR300 | HR600 | HR1200 | ||
| Pump | DRP | HR60 | HR90 | HR60 | HR90 | HR90 | |
| MBP | - | - | PRC-003A | PRC-006A | PRC-012A | ||
| Max. pumping speed |
50Hz | m3/h (L/min) |
62(1030) | 112(1860) | 359(5,980) | 653(10,900) | 1,012(16,900) |
| 60Hz | m3/h (L/min) |
80(1333) | 126(2100) | 365(6,080) | 701(11,700) | 1,051(17,500) | |
| Ultimate pressure | Pa | 5 | 0.67 | ||||
| Max. inlet pressure | Atmospheric pressure *1 | ||||||
| Max. exhaust pressure | Pa | 1.0 to Atmospheric pressure | |||||
| Inlet diameter (type CE) | VG50(KF50) | VG80(KF50) | VG80(KF80) | VG100(KF100) | |||
| Outlet diameter | KF40 | ||||||
| Weight | kg | 180 | 245 | 275 | 370 | 420 | |
| Power | Three phase |
VAC (Hz) |
200(50/60), 220(60) | ||||
| Current | At ultimate pressure |
A | 7.1 (at 200V) |
11.2 (at 200V) |
7.8 (at 200V) |
12.9 (at 200V) |
15.4 (at 200V) |
| At max. load |
A | 7.3 (at 200V) |
11.8 (at 200V) |
8.1 (at 200V) |
13.8 (at 200V) |
18.9 (at 200V) |
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| Cooling water Supply pressure |
MPa | 0.1~0.3 | 0.1~0.3 | ||||
| Cooling water In/Out differrencepressure |
MPa | >0.1 | |||||
| Cooling water Flow rate | L/min | >5.0 | |||||
| N2 gas | Supply pressure |
MPa | 0.1~0.5 | ||||
| Regula- ted pressure |
MPa | 0.05~0.1 | |||||
| N2 purge | Shaft purge |
SLM | 5 | ||||
| Gas ballast | SLM | 0~45 | |||||
*1 HR300, HR600 and HR1200 should all be operated below 200Pa (1.5 Torr).
Dimension drawing
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