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Multi-Stage Roots Type Dry Vacuum Pump
HR/UR Series
UR
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Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.
Features
- Uniform high temparature distribution pump
The HR series pump is designed to keep uniform high temparature for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
The UR series pump is enable to keep higher temparature than HR series. - Excellent helium pumping capability
Canned motor for safety and ease of maintenance. - Power failure protection
Pump withstands power interruptions of up to 1000ms duration. - Superior resistance for corrosive gas
Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses. - Communication function
Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
Applications
- CVD equipment
- Etching equipment
- Ashing equipment
- ALD、ALH etc
Specifications
| Model | UR421-T | UR600 | UR1200 | UR1800 | UR3601-TT | ||||
| Pump | DRP |
UR421-T
|
UR90 | UR90 | UR180 | UR421-T | |||
| MBP | - | PRC-006A | PRC-012A | PRC-018A | PRC-036C-T | ||||
| Max. pumping speed |
50Hz | 410 m3/h (6833 L/min) |
653 m3/h (10883 L/min) |
1012 m3/h (16867 L/min) |
1701 m3/h (28350 L/min) |
2700 m3/h (45000 L/min) |
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| Ultimate pressure |
5.0 Pa
|
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| Max. inlet pressure | Atmospheric pressure*1 | ||||||||
| Max. exhaust pressure | 1.0 to Atmospheric pressure Pa | ||||||||
| Inlet diameter(type CE) | VG100 |
VG80(NW80)
|
VG100(NW100)
|
VG150(NW100)
|
VG150
|
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| Outlet diameter | VG50 |
NW40
|
NW50
|
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| Weight | 415 kg | 370 kg | 403 kg | 553 kg | 720 kg | ||||
| Power | Three phase |
180～240 VAC/ 380～440 VAC (50/60 Hz) |
200 VAC(50/60 Hz) /220 VAC(60 Hz) | 180～240 VAC/ 380～440 VAC (50/60 Hz) |
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| Current | At ultimate pressure | 23 A (at 200V) | 16.4 A (at 200V) | 18.9 A (at 200V) | 29.2 A (at 200V) 20.5 A (at 400V) |
39.8 A (at 200V) 20.5 A ( at 400V) |
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| At max. load |
52.5 A (at 200V) | 17.3 A (at 200V) | 22.4 A (at 200V) | 34.9 A (at 200V) 40.5 A (at 400V) |
68.3 A (at 200V) 40.5 A (at 400V) |
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| Cooling water Supply pressure |
0.2~0.5 Mpa | 0.1~0.3 Mpa | 0.2~0.5 Mpa | ||||||
| Cooling water In/ Out differrencepressure |
>0.2 Mpa | >0.1 Mpa | >0.1 Mpa | >0.1 Mpa | >0.2 Mpa | ||||
| Cooling water Flow rate | >5.0 L/min | ||||||||
| N2 gas | Supply pressure |
0.1~0.5 Mpa | |||||||
| Regula-ted pressure |
0.05~0.1 Mpa | ||||||||
| N2 purge | Shaft purge | 5 SLM | |||||||
| Gas ballast | 0~195 SLM | 0~45 SLM | 0~195 SLM | 0~195 SLM | |||||
*1: UR600, UR1200, UR1800 and UR3601-TT should all be operated below 200Pa (1.5 Torr).
* Please confirm us if you want UR series, which is not written in this specification list.
■Operation mode
| Dry pump operation mode | 1 | 2 | 3 | |||||
| N2 flow rate | SLM | 0 | 5 | 5~50*1 | ||||
Please select the operation mode when you order.(UR series standard operation mode: 3 )
