Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment



ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption
by attaching to the dry pump exhaust line


  • Energy saving
    Max.80% reduction of power consumption of the dry pump.
    Also, ECO-SHOCK enable to save the cost of air conditioning because it helps to reduce heat generation from the pump.
     * ECHO-SHOCK is not available for the pump which evacuates flammable and
      toxic corrosive gas spiecies.
  • Pump performance improovement
    Reduce the noise level while pumping.
    No reduction of pumping performance at all pressure range.
    Most effective for long continuous pumping time less than 1000Pa.
     *ECO-SHOCK is capable to use with the dry pump that exhaust port can be in vacuum condition.
  • Simple installation


  • Dry vacuum pumps for evacuating iner gases such as air, nitrogen or argon.
  • Dry vacuum pumps used with sputtering or loading / unloading chambers.


Model ES10 ES4A
Power supply Specification 100 to 220 VAC, 50 / 60 Hz, single-phase AC200~220V±5% 50/60Hz single-phase
65W *1 400W
Control Input Remote start / stop (DC 24V contact with voltage)
Non-voltage contact with contact capacity of 2.0 A Min. required. *2
Output Overcurrent alarm output
(non-voltage contact)
Contact capacity : DC 24V, 1.0 A
Activation checker, Energy saving checker,
Main unit alarm, Over-current alarm
Display Display of operation time Display Running time, Activation checker,
Energy saving checker, Main unit alarm,
Over-current alarm
Dimensions Eco-Shock 175mm x 310mm x 240mm 250mm x 475mm x 373mm
Valve unit Φ66mm×110mm(NW40) *3 Option
Weight Eco-Shock:8.3kg Valve unit:800g
Connection Connection
The connector has been installed.
Φ16mm tube connector
(Recommend for tubing length of 1.5m less)

*1: Pressure is at ultimate puressure and gas for shaft seal and gas ballast are 0Pam3/s
*2: Pin jumper connection is required to operate the manual Start/Stop by circuit protector.(for ES4A)
*3: Valve unit for ES4A is attached when you order ES4A.



ULVAC pump model LR1800 LR3601-R
Pumping speed *1 Mechanical booster pump 1784 m3/hr (29700 L/min) 3200 m3/hr (53333 L/min)
Dry pump 237 m3/hr (3950 L/min) 440 m3/hr (7333 L/min)
Average power

*2 *3
At ultimate
Without ES4A 6.0 kW 7.8 kW
With ES4A 2.7 kW 3.2 kW
Power save 55 % 59 %
At repeatable
Without ES4A 7.2 kW 9.6 kW
With ES4A 5.7 kW 6.3 kW
Power save 21 % 34 %

*1 At 60Hz power
*2 At Seal Gas 5SLM
*3 Include ES4A Power
*4 Measure example of 300L chamber repeatedly air exhaust in the tact of 60 seconds.


Model LR60 LR90 LR180
Evacuation speed*1 1300L/min 2100L/min 3980L/min
Measured power Consumption*2 2.1kW 3.6kW 6.6kW
Measured power consumption
with ECO-SHOCK attached *2 *3 *4
0.7kW 1.0kW 1.6kW
Power reduction rate 67% 72% 76%

*1 At 60Hz power.
*2 Power consumption at ultimate pressure.
*3 Including power consumption of ECO-SHOCK.
*4 Reading at ultimate pressure, with shaft seal and gas ballast at 0Pa・m3/s.
  These valves  change slightly depending on the gas flow at ballast and shaft seal.

Dimension drawing


Valve unit dimension drawing

  • ES4A NW40ES4A KF40Valve unit_size.png
  • ES4A NW50ES4A KF50Valve unit_size.png
  • ES10
ES10_KL5000-023B__A3K Model_Vaalve unit_size.png

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept