Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment

ECO-SHOCK

アルバック

ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption
by attaching to the dry pump exhaust line

Features

  • Energy saving
    Max.80% reduction of power consumption of the dry pump.
    Also, ECO-SHOCK enable to save the cost of air conditioning because it helps to reduce heat generation from the pump.
     * ECHO-SHOCK is not available for the pump which evacuates flammable and
      toxic corrosive gas spiecies.
  • Pump performance improovement
    Reduce the noise level while pumping.
    No reduction of pumping performance at all pressure range.
    Most effective for long continuous pumping time less than 1000Pa.
     *ECO-SHOCK is capable to use with the dry pump that exhaust port can be in vacuum condition.
  • Simple installation

Applications

  • Dry vacuum pumps for evacuating iner gases such as air, nitrogen or argon.
  • Dry vacuum pumps used with sputtering or loading / unloading chambers.

Specifications

Model ES10 ES4A
Power supply Specification 100 to 220 VAC, 50 / 60 Hz, single-phase AC200~220V±5% 50/60Hz single-phase
Power
consumption
65W *1 400W
Control Input Remote start / stop (DC 24V contact with voltage)
Non-voltage contact with contact capacity of 2.0 A Min. required. *2
Output Overcurrent alarm output
(non-voltage contact)
Contact capacity : DC 24V, 1.0 A
Activation checker, Energy saving checker,
Main unit alarm, Over-current alarm
Display Display of operation time Display Running time, Activation checker,
Energy saving checker, Main unit alarm,
Over-current alarm
Dimensions Eco-Shock 175mm x 310mm x 240mm 250mm x 475mm x 373mm
Valve unit Φ66mm×110mm(NW40) *3 Option
Weight Eco-Shock:8.3kg Valve unit:800g
Connection Connection
port
G1/4" (INLET、OUTLET) 
The connector has been installed.
Φ16mm tube connector
(Recommend for tubing length of 1.5m less)

*1: Pressure is at ultimate puressure and gas for shaft seal and gas ballast are 0Pam3/s
*2: Pin jumper connection is required to operate the manual Start/Stop by circuit protector.(for ES4A)
*3: Valve unit for ES4A is attached when you order ES4A.

Effects

ES4A

ULVAC pump model LR1800 LR3601-R
Pumping speed *1 Mechanical booster pump 1784 m3/hr (29700 L/min) 3200 m3/hr (53333 L/min)
Dry pump 237 m3/hr (3950 L/min) 440 m3/hr (7333 L/min)
Average power
consumption

*2 *3
At ultimate
pressure
Without ES4A 6.0 kW 7.8 kW
With ES4A 2.7 kW 3.2 kW
Power save 55 % 59 %
At repeatable
pumping
*4
Without ES4A 7.2 kW 9.6 kW
With ES4A 5.7 kW 6.3 kW
Power save 21 % 34 %

*1 At 60Hz power
*2 At Seal Gas 5SLM
*3 Include ES4A Power
*4 Measure example of 300L chamber repeatedly air exhaust in the tact of 60 seconds.

ES10

Model LR60 LR90 LR180
Evacuation speed*1 1300L/min 2100L/min 3980L/min
Measured power Consumption*2 2.1kW 3.6kW 6.6kW
Measured power consumption
with ECO-SHOCK attached *2 *3 *4
0.7kW 1.0kW 1.6kW
Power reduction rate 67% 72% 76%

*1 At 60Hz power.
*2 Power consumption at ultimate pressure.
*3 Including power consumption of ECO-SHOCK.
*4 Reading at ultimate pressure, with shaft seal and gas ballast at 0Pa・m3/s.
  These valves  change slightly depending on the gas flow at ballast and shaft seal.

Dimension drawing

ECO-SHOCK_en_size.png

Valve unit dimension drawing

  • ES4A NW40ES4A KF40Valve unit_size.png
  • ES4A NW50ES4A KF50Valve unit_size.png
  • ES10
ES10_KL5000-023B__A3K Model_Vaalve unit_size.png

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