Scroll Type Dry Vacuum Pump




Double wrap / terminal only (without cord) with switch / with thermal protector / with air flash


  • Compact size with large displacement.
  • The highest level of ultimate pressure for dry vacuum pumps.
  • Safety design with built-in automatic reset type thermal protector (for single phase).
  • Suppresses moisture condensation by air flush.


  • Analytical equipment.
  • Gas recovery system.
  • Coating equipment.
  • Back pump for TMP.
  • Helium leak detector.
  • Manufacturing process for semiconductor.


Unit 50Hz 60Hz
Actual pumping speed※1
L/min 500 600
Ultimate pressure
Pa 1.0
Single phase   100/115/200/230V, 600W, 4P , Capacitor start/run
Three phase 200/208/230/380/400/415/460V, 600W, 4P
Full load current
Single phase A 8.5/4.3/3.9
Three phase 2.7/1.57/1.57/1.63
Single phase kg 44.0
Three phase 38.0
Inlet flange
Outlet pipe diameter
Ambient temperature
Water vapor handing
g/day ≦25(AF open※3, Room temperature 25℃, Humidity 60% or less)
Noise level
Single phase dB ≦62(AF open※3, ≦70)
Three phase ≦60(AF open※3, ≦68)
External dimensions
Single phase mm 290(W)×443(L)×397(H)
Three phase 292(W)×372(L)×397(H)
※1:Actual pumping speed is about 1.2 times the Actual pumping speed when a gas at atmospheric pressure is sucked.
※2:Power supply plug and Power supply code are not included.
※3:AF=Air flush
The air flush operation not only discharges the water remaining in the pump, but also has the effect of recovering the Ultimate pressure.

Corresponding certificate/Voltage

Model Applicable standard CEDeclartion of confirmity
100V series

200V series

200V series

400V series
DIS-501 cTUV
(Can be switched by changing the terminal plate)

(Can be switched by changing the terminal plate)
●:Standard、○:Option、-:Not Applicable
cTUV certification: This is a high quality product that complies with Canadian standards, as assessed by an international third party that conducts product safety testing and certification.


If the pump evacuates the powder or the product, it might be damaged.
Please use the inlet filter etc.
Do not evacuate gas which is hazardous to humans or explosive, flammable, or corrosive. If done, it can cause failure by gas, explosion or ignite.
The Three phaseSpecification does not have motor protection.
Be sure to install a protective device such as an earth leakage circuit breaker.

Dimension drawing

DIS-501(Single phase)


> CAD data download(DXF)

DIS-501(Three phase)


> CAD data download(DXF)

Pumping Speed Curves


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