Scroll Type Dry Vacuum Pump
- Compact size with large displacement.
- The highest level of ultimate pressure for dry vacuum pumps.
- Safety design with built-in automatic reset type thermal protector (for single phase).
- Suppresses moisture condensation by air flush.
- Analytical equipment.
- Gas recovery system.
- Coating equipment.
- Back pump for TMP.
- Helium leak detector.
- Manufacturing process for semiconductor.
※2：Power supply plug and Power supply code are not included.
The air flush operation not only discharges the water remaining in the pump, but also has the effect of recovering the Ultimate pressure.
※cTUV certification: This is a high quality product that complies with Canadian standards, as assessed by an international third party that conducts product safety testing and certification.
If the pump evacuates the powder or the product, it might be damaged.
Please use the inlet filter etc.
Do not evacuate gas which is hazardous to humans or explosive, flammable, or corrosive. If done, it can cause failure by gas, explosion or ignite.
The Three phaseSpecification does not have motor protection.
Be sure to install a protective device such as an earth leakage circuit breaker.
Pumping Speed Curves
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